Patents by Inventor Lawrance A. Ringor

Lawrance A. Ringor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system
    Patent number: 6219219
    Abstract: A cathode assembly having a pedestal and a detachable susceptor. Various contact assemblies containing a canted spring are utilized to make electrical connection between the pedestal and detachable susceptor. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.
    Type: Grant
    Filed: September 30, 1998
    Date of Patent: April 17, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Gilbert Hausmann, Anantha Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu, Lawrance A. Ringor, Michael N. Sugarman