Patents by Inventor Lawrence Allen Gochberg

Lawrence Allen Gochberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inverted hot plate cure module
    Patent number: 6544338
    Abstract: A curing module for use in fabricating semiconductor wafers is provided. The cure module comprises a housing and a bottom plate. The housing also contains a heating plate adjacent a top surface of the housing and side walls extending from the top surface. The housing sidewalls, the heating plate and the bottom plate define a chamber within the cure module. Films disposed on semiconductor wafers are cured within the chamber by being raised on lift pins to the heating plate during a heating operation and then lowered on the lift pins to the bottom plate during a cooling operation.
    Type: Grant
    Filed: February 10, 2000
    Date of Patent: April 8, 2003
    Assignee: Novellus Systems, Inc.
    Inventors: William Tom Batchelder, Fred Joseph Chetcuti, Lawrence Allen Gochberg