Abstract: A method for cleaning a substrate surface using ultrasonic energy includes an array of ‘N’ transducer elements. Electrical signals, Sn, having signal parameters including a voltage, VN, and phase, ?N, are provided to drive each transducer element and generate respective ultrasonic waves. A computer sub-system is used to control the signal parameters to establish a substantially uniform cavitation energy at a plurality of locations on the substrate surface. The signal parameters can be established to focus or steer the ultrasonic energy from the array to each location. To calculate the electrical signal parameters, the computer sub-system can use some or all of the following as inputs; the arrangement and inter-element spacing of the transducer elements, characteristics of the fluid medium, and the coordinates of the locations requiring cleaning.

Abstract: A system for cleaning a substrate surface using ultrasonic energy includes an array of ‘N’ transducer elements. Electrical signals, Sn, having signal parameters including a voltage, VN, and phase, &thgr;N, are provided to drive each transducer element and generate respective ultrasonic waves. A computer sub-system is provided to control the signal parameters to establish a substantially uniform cavitation energy at a plurality of locations on the substrate surface. The signal parameters can be established to focus or steer the ultrasonic energy from the array to each location. To calculate the electrical signal parameters, the computer sub-system can use some or all of the following as inputs; the arrangement and inter-element spacing of the transducer elements, characteristics of the fluid medium, and the coordinates of the locations requiring cleaning.

Abstract: An apparatus and method for measuring cavitation energy of a device placed in a cleaning bath tank of ultrasonic and megasonic cleaning systems. Probe apparatus having an array of probes positioned within the bath detects formation of bubbles at various locations within the bath that are generated by ultrasonic and megasonic vibrations applied to the bath with each probe of the array generating an electrical waveform in response to the detection of the bubbles. Apparatus coupled to each probe of the probe array analyzes the probe-generated voltages and determines cavitation energy profiles occurring on surfaces of a device located in the bath.