Patents by Inventor Lawrence P. Flannery

Lawrence P. Flannery has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for processing silicon on insulator wafers
    Patent number: 8080464
    Abstract: Methods are provided for etching and/or depositing an epitaxial layer on a silicon-on-insulator structure comprising a handle wafer, a silicon layer, and a dielectric layer between the handle wafer and the silicon layer. The silicon layer has a cleaved surface defining an outer surface of the structure. The cleaved surface of wafer is then etched while controlling a temperature of the reactor such that the etching reaction is kinetically limited. An epitaxial layer is then deposited on the wafer while controlling the temperature of the reactor such that a rate of deposition on the cleaved surface is kinetically limited.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: December 20, 2011
    Assignee: MEMC Electronics Materials, Inc,
    Inventors: Swapnil Y. Dhumal, Lawrence P. Flannery, Thomas A. Torack, John A. Pitney
  • Methods For Processing Silicon On Insulator Wafers
    Publication number: 20110159668
    Abstract: Methods are provided for etching and/or depositing an epitaxial layer on a silicon-on-insulator structure comprising a handle wafer, a silicon layer, and a dielectric layer between the handle wafer and the silicon layer. The silicon layer has a cleaved surface defining an outer surface of the structure. The cleaved surface of wafer is then etched while controlling a temperature of the reactor such that the etching reaction is kinetically limited. An epitaxial layer is then deposited on the wafer while controlling the temperature of the reactor such that a rate of deposition on the cleaved surface is kinetically limited.
    Type: Application
    Filed: December 17, 2010
    Publication date: June 30, 2011
    Applicant: MEMC ELECTRONIC MATERIALS, INC.
    Inventors: Swapnil Y. Dhumal, Lawrence P. Flannery, Thomas A. Torack, John A. Pitney