Patents by Inventor Lawrence Roberts Miller

Lawrence Roberts Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240124186
    Abstract: The invention comprises a container comprising: a base; at least one paper-based sidewall seamed to and extending upwardly from the base, wherein the at least one sidewall comprises a score line near the base that is at least partially circumferential and is configured to be torn through to remove the base from the sidewall; and a liner ply adhered to an interior surface of the sidewall.
    Type: Application
    Filed: December 28, 2023
    Publication date: April 18, 2024
    Inventors: Lawrence Robert Carpenter, Tony L. Thomas, Paul E. Miller, Kurt A. Ziegenfelder
  • Patent number: 9989477
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. In one embodiment, a one-dimensional array of illumination beams is directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: June 5, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Publication number: 20170205358
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. In one embodiment, a one-dimensional array of illumination beams is directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
    Type: Application
    Filed: December 29, 2016
    Publication date: July 20, 2017
    Applicant: KLA-Tencor Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Patent number: 9568435
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. In one embodiment, a one-dimensional array of illumination beams is directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: February 14, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Publication number: 20140362372
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously.
    Type: Application
    Filed: August 21, 2014
    Publication date: December 11, 2014
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Patent number: 8817248
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding receiver or detector so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. Radiation reflected from the spots is imaged into a first array of receivers or detectors so that each receiver in the first array receives radiation from a corresponding spot in the array of spots; and scattered radiation from the spots is imaged onto a second array of receivers or detectors in a dark field imaging scheme so that each receiver or detector in the second array receives radiation from a corresponding spot.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: August 26, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Patent number: 7978323
    Abstract: Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
    Type: Grant
    Filed: December 10, 2008
    Date of Patent: July 12, 2011
    Assignee: KLA—Tencor Technologies Corporation
    Inventors: Lawrence Robert Miller, Mehdi Vaez-Iravani
  • Publication number: 20090161096
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously.
    Type: Application
    Filed: January 29, 2009
    Publication date: June 25, 2009
    Applicant: KLA- Tencor Technologies Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Roberts Miller
  • Publication number: 20090116004
    Abstract: Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
    Type: Application
    Filed: December 10, 2008
    Publication date: May 7, 2009
    Inventors: Lawrence Robert Miller, Mehdi Vaez-Iravani
  • Patent number: 7492451
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface.
    Type: Grant
    Filed: October 26, 2006
    Date of Patent: February 17, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller
  • Patent number: 7471382
    Abstract: Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
    Type: Grant
    Filed: October 3, 2005
    Date of Patent: December 30, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Lawrence Robert Miller, Mehdi Vaez-Iravani
  • Patent number: 7130039
    Abstract: A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously.
    Type: Grant
    Filed: April 17, 2003
    Date of Patent: October 31, 2006
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mehdi Vaez-Iravani, Lawrence Robert Miller