Abstract: A telescoping linear extension robot includes a base configured to support the telescoping linear extension robot, a first driven platform, drivingly coupled to the base, a second driven platform, drivingly coupled to the first driven platform, and a floating intermediate platform. The intermediate platform is configured to increase the extendable range of the driven extensions by facilitating additional extension using force generated by the driven platforms of the robot. This, in turn, allows for long-reach robot solutions with reduced physical footprint, complexity and cost.

Abstract: A telescoping linear extension robot includes a base configured to support the telescoping linear extension robot, a first driven platform, drivingly coupled to the base, a second driven platform, drivingly coupled to the first driven platform, and a floating intermediate platform. The intermediate platform is configured to increase the extendable range of the driven extensions by facilitating additional extension using force generated by the driven platforms of the robot. This, in turn, allows for long-reach robot solutions with reduced physical footprint, complexity and cost.

Abstract: A linear axis robotic structure including a Z-tower. A vertical drive is configured within the Z-tower, and a vertical drive mechanism is adapted to integrate with the vertical drive for linear movement along the Z-tower along a Z-axis. A first section arm is adapted to attach to the vertical drive mechanism and having a horizontal orientation, wherein the first section arm is configured for linear movement along the Z-tower with movement of the vertical drive mechanism. A first linear drive is configured within the first section arm. A first linear drive mechanism is adapted to integrate with the first linear drive for linear movement along the first section arm along a Y-axis. A first gripper is adapted to attach to the first linear drive mechanism and adapted for linear movement along the Y-axis with movement of the first linear drive mechanism.

Abstract: A linear axis robotic structure including a Z-tower. A vertical drive is configured within the Z-tower, and a vertical drive mechanism is adapted to integrate with the vertical drive for linear movement along the Z-tower along a Z-axis. A first section arm is adapted to attach to the vertical drive mechanism and having a horizontal orientation, wherein the first section arm is configured for linear movement along the Z-tower with movement of the vertical drive mechanism. A first linear drive is configured within the first section arm. A first linear drive mechanism is adapted to integrate with the first linear drive for linear movement along the first section arm along a Y-axis. A first gripper is adapted to attach to the first linear drive mechanism and adapted for linear movement along the Y-axis with movement of the first linear drive mechanism.

Abstract: A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

Abstract: A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

Abstract: A dual voice coil shutter is disclosed. The shutter mechanism is utilized in a stepper system, a laser system, or other carefully channeled light device to provide for opening and closing upon an optical path. The present invention is particularly useful for controlling passage of light hitting a photoresistive wafer through a reticle in a stepper system.The present invention provides a shutter type mechanism rotatably mounted about a common axis where the mechanism includes a pair of blades having a scissors-like arrangement adapted to simultaneously open and close upon an optical path. A voice type coil means is provided for each of the blades such that when a DC electrical current is applied to the coils, a rotation of the blades is effected about a single axis of rotation in a predetermined period of time. The rotation of the coils is coplanar.

Abstract: A disposable, portable water filter that is suited for filtering small quantities of drinking water. In one embodiment the filter may be placed over a jar or drinking glass and unfiltered water poured into the jar or glass through the filter. In another embodiment, the filter includes the jar which has a lid with a rim that fits tightly around the neck of the jar. The lid may have an opening for pouring unfiltered water into the jar and filtered water out from the jar. The lid may have an opening for pouring unfiltered water into the jar and filtered water out from the jar. The filter thereby provides twice the filtering effect. The filter in a preferred embodiment consists of containing material that forms a pouch for holding the filter medium and a skirt for suspending the filter. In another embodiment the filter may consist of one sheet of metal foil shaped like a bowl for containing the filter medium, and has handles extending from the bowl for holding the filter over a jar or drinking glass.

Abstract: X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.

Abstract: A braided cord and a connector are provided for remote control of a rotary knob.

Abstract: A shutter is rotatably mounted in a housing for opening and closing a shutter aperture in the housing. The shutter is coupled to a drive unit for unidirectionally rotating the shutter with the same velocity profile to open and close the shutter aperture during each exposure period. This drive unit includes a drive motor and a control circuit having a source of position and velocity reference data and a feedback control loop configurable for either position or velocity control of the shutter as determined by a control command.

Abstract: A shock and vibration isolation system having a plurality of isolators supporting a utilization device is disclosed. Each isolator has two gas driven pistons, pivotally mounted in a frame and is connected to an accumulator/controller that supplies controlled amounts of pressurized gas. A sensor in each isolator senses the position of the utilization device with respect to a base sitting on the ground, and the accumulator/controller adds gas to or exhausts gas from the pistons to counteract changes in position detected by the sensor. An electronic control circuit is connected between the sensor and the accumulator/controller to supply a properly compensated signal from the sensor to control the accumulator/controller.