Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.

Abstract: Described herein is a composite coating on a substrate including a parylene layer deposited on a substrate surface of a substrate, a metal oxide layer covering the parylene layer, and a metal oxide, parylene hybrid layer formed between the metal oxide layer and the parylene layer.

Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.

Abstract: Described herein is a multi-layer thin film stack including a first ALD layer of a first metal oxide deposited on a substrate surface of a substrate, a first parylene layer covering the first ALD layer, and a second ALD layer of a second metal oxide covering the first parylene layer. The multi-layer thin film stack further includes a second parylene layer covering the second ALD layer.

Abstract: Described herein is a composite coating on a substrate including a parylene layer deposited on a substrate surface of a substrate, a metal oxide layer covering the parylene layer, and a metal oxide, parylene hybrid layer formed between the metal oxide layer and the parylene layer.

Abstract: Described herein is a composite coating on a substrate including a first parylene layer deposited on a substrate surface of a substrate, a first metal oxide layer covering the first parylene layer, a first metal oxide, parylene hybrid layer formed between the first metal oxide layer and the first parylene layer. The composite coating further includes a second parylene layer covering the first metal oxide layer, with the first metal oxide layer interposed between the first and second parylene layers.

Abstract: The disclosure extends to protectively coated energy storage devices, such as rechargeable batteries, and associated methods of forming the same. An energy storage device, such as a rechargeable battery, may comprise a cell including at least one electrical terminal and a circuit board electrically coupled to the at least one electrical terminal. The rechargeable battery may also include a protective coating on at least a portion of at least one of a surface of the cell and/or at least one surface of the circuit board. The protective coating may reside between the circuit board and the cell. The protective coating may comprise a moisture resistant coating that will withstand exposure to corrosive agents, including electrolytes, corrosive gases and dust.

Abstract: The disclosure extends to protectively coated energy storage devices, such as rechargeable batteries, and associated methods of forming the same. An energy storage device, such as a rechargeable battery, may comprise a cell including at least one electrical terminal and a circuit board electrically coupled to the at least one electrical terminal. The rechargeable battery may also include a protective coating on at least a portion of at least one of a surface of the cell and/or at least one surface of the circuit board. The protective coating may reside between the circuit board and the cell. The protective coating may comprise a moisture resistant coating that will withstand exposure to corrosive agents, including electrolytes, corrosive gases and dust.

Abstract: A method to achieve a conformal ultrathin film of platinum or one of its alloys on a substrate that can be economically used as a heterogeneous catalyst, such as automotive polymer electrolyte membrane (PEM) fuel cell catalyst. The method includes using a hydrogen plasma in platinum atomic layer deposition along with tungsten as a substrate or anchoring adhesive layer to assist platinum nucleation and deposition.

Abstract: A method to achieve a conformal ultrathin film of platinum or one of its alloys on a substrate that can be economically used as a heterogeneous catalyst, such as automotive polymer electrolyte membrane (PEM) fuel cell catalyst. The method includes using a hydrogen plasma in platinum atomic layer deposition along with tungsten as a substrate or anchoring adhesive layer to assist platinum nucleation and deposition.