Patents by Inventor Lea Adams

Lea Adams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for lubricating MEMS components
    Patent number: 6806993
    Abstract: The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.
    Type: Grant
    Filed: June 4, 2003
    Date of Patent: October 19, 2004
    Assignee: Texas Instruments Incorporated
    Inventors: Lea Adams, Edward C. Fisher, Josh Malone, Seth Miller, Jack C. Smith, William Kevin Dennis, Jeffrey W. Marsh