Abstract: A transparent inter-metal dielectric utilized in a CMOS image sensor includes a flowlayer sandwiched between a base SiO2 layer and a cap SiO2 layer. The flowlayer is formed by reacting SiH4 and H2O2 using a shortened H2O2 stabilization time, using a reduced deposition pressure, and while maintaining the reaction chamber platen at a target value of approximately 1° C.

Abstract: Disclosed is a direct drive servovalve having a molded plastic housing. A metal sleeve having a spool valve slidably disposed therein is placed within opposed cavities formed within opposite housing halves. The housing halves are brought together under pressure and an ultrasonic horn is activated. Energy directing beads formed on the housing halves as well as interfering surfaces about the periphery melt under a pressure and ultrasonic energy allowing the two housing halves to move toward each other and mate. Upon deactivation of the ultrasonic horn, the molten plastic material cools and forms a seal about flow ports in the metallic sleeve as well as a fusion bond about the periphery of the housing.