Abstract: A scanning microscope for high resolution current imaging by direct magnetic field sensing of a sample maintained in an ambient environment. The scanning microscope uses a magnetic sensor such as a SQUID and a fiber probe magnetically coupled between the SQUID sensor and the sample under study. The fiber probe has a sharply defined tip for high resolution probing and for reaching minute cavities on the surface of the sample. The coupling between the tip of the fiber probe and the sample is controlled by a distance control mechanism, in the range of 1-100 nm. The material of the fiber probe with high permeability and low magnetic noise is chosen to optimize flux transmission to the magnetic sensor. Magnetic coupling to the sensor is maximized by keeping the distance between the end of the fiber probe and the sensor to approximately 0-100 ?m. The fiber probe is integrated into the fiber holder for easy replacement of the fiber probe.

Abstract: Circuit flaws in microelectronic circuitry present regions of high resistance in which a current distribution deviates from that of a defect-free circuit. The altered current distribution emits a correspondingly altered magnetic field in accordance with Ampere's Law. When compared with the magnetic field of a defect-free circuit, the anomaly in the magnetic field of the defective device is detected and the location of the circuit flaw may be determined therefrom. As the anomaly in the magnetic field is very small in magnitude, a sensitive magnetic microscope is utilized to obtain images of the magnetic fields of a defect-free reference device and a device-under-test. The distance between the magnetic sensor and the devices being scanned is precisely controlled to minimize influences of scanning distance on the difference in measured magnetic field strength. Comparative image analysis reveals the location of the circuit flaw.

Abstract: A scanning microscope for high resolution current imaging by direct magnetic field sensing of a sample maintained in an ambient environment. The scanning microscope uses a magnetic sensor such as a SQUID and a fiber probe magnetically coupled between the SQUID sensor and the sample under study. The fiber probe has a sharply defined tip for high resolution probing and for reaching minute cavities on the surface of the sample. The coupling between the tip of the fiber probe and the sample is controlled by a distance control mechanism, in the range of 1-100 nm. The material of the fiber probe with high permeability and low magnetic noise is chosen to optimize flux transmission to the magnetic sensor. Magnetic coupling to the sensor is maximized by keeping the distance between the end of the fiber probe and the sensor to approximately 0-100 ?m. The fiber probe is integrated into the fiber holder for easy replacement of the fiber probe.

Abstract: Circuit flaws in microelectronic circuitry present regions of high resistance in which a current distribution deviates from that of a defect-free circuit. The altered current distribution emits a correspondingly altered magnetic field in accordance with Ampere's Law. When compared with the magnetic field of a defect-free circuit, the anomaly in the magnetic field of the defective device is detected and the location of the circuit flaw may be determined therefrom. As the anomaly in the magnetic field is very small in magnitude, a sensitive magnetic microscope is utilized to obtain images of the magnetic fields of a defect-free reference device and a device-under-test. The distance between the magnetic sensor and the devices being scanned is precisely controlled to minimize influences of scanning distance on the difference in measured magnetic field strength. Comparative image analysis reveals the location of the circuit flaw.

Abstract: A film deposition system for coating large surfaces includes a target translated in parallel to the surface, and an energetic beam (laser beam) directed in parallel to the surface to be coated and impinging on the target, so that a plasma plume extends from the target to the surface to be coated. Translational motion of the target relative to the surface to be coated causes the plasma plume to scan over the surface and to deposit a thin film of a material from the target on the surface. Surfaces of unlimited size can be coated by this technique. The system provides short target-surface distances, high deposition rates, and can utilize small targets. An arrangement including several independently controlled and moving targets is utilized for coating surfaces having complicated shapes.

Abstract: A non-linear optical thin film layer system (10) is provided for integrated optics applications where a non-linear optical thin film layer (18) is integrated with a gallium-arsenide substrate (12). A first encapsulating layer (20) is deposited on lower surface (26), peripheral sides (30), and an upper surface peripheral region (28) of said gallium-arsenide substrate (12). A second encapsulating and buffer layer (14) is epitaxially grown on an upper surface of said gallium-arsenide substrate (12) and on the encapsulated upper surface peripheral region (28) of said gallium-arsenide substrate (12). A perovskite layer (16) is epitaxially grown on an upper surface of the layer (14). A non-linear optical thin film layer (18) is epitaxially grown on an upper surface of the perovskite layer (16) and is lattice matched to this layer.