Abstract: An integrated circuit device includes a device layer having devices spaced in accordance with a predetermined device pitch, a first metal interconnection layer disposed above the device layer and coupled to the device layer, and a second metal interconnection layer disposed above the first metal interconnection layer and coupled to the first metal interconnection layer through a first via layer. The second metal interconnection layer has metal lines spaced in accordance with a predetermined metal line pitch, and a ratio of the predetermined metal line pitch to predetermined device pitch is less than 1.

Abstract: Disclosed is a micro droplet generator which comprises a lower space for containing a control panel, and an upper chamber for containing fluid medicine and including an nebulized area formed on a joining portion of the space and thereof. On the nebulized area there are provided an outer nozzle plate including tapered apertures and a piezoelectric element electrically coupled to the control panel. Activating the piezoelectric element will vibrate it to sufficiently mix the liquid medicine for developing fluid cavitation in the nebulized area, forms a stream of droplets from small particles of the fluid medicine and ejects the same therefrom, condenses the large particles of the fluid medicine due to collision therebetween, and drops the condensed liquid into the fluid medicine. Also, any malfunctioned component can be replaced individually.

Abstract: Disclosed is a micro droplet generator which comprises a lower space for containing a control panel, and an upper chamber for containing fluid medicine and including an nebulized area formed on a joining portion of the space and thereof. On the nebulized area there are provided an outer nozzle plate including tapered apertures and a piezoelectric element electrically coupled to the control panel. Activating the piezoelectric element will vibrate it to sufficiently mix the liquid medicine for developing fluid cavitation in the nebulized area, forms a stream of droplets from small particles of the fluid medicine and ejects the same therefrom, condenses the large particles of the fluid medicine due to collision therebetween, and drops the condensed liquid into the fluid medicine. Also, any malfunctioned component can be replaced individually.