Abstract: An installation for measuring pressure along a pipeline. The installation includes a control valve between a vacuum gauge and a pipe section attached to the pipeline. Relying on open and close signals from a main valve, the control valve is opened and closed accordingly. The control valve is shut when the reaction chamber of a processing station is undergoing an operation. Since volatile emission from the chamber is prevented from reaching the interior surface of the vacuum gauge to form a coated layer, shifting of measured pressure is avoided and working life of the vacuum gauge is extended.

Abstract: The invention is a leakage testing tool for a bellow of a semiconductor manufacturing machine. The testing tool has a plate, a first rack and an opposite second rack, both racks formed on the plate and supporting the bellow. Two movable plates each engage with a respective one of two adjustment screws. Each adjustment screw can adjust a flat end of one of the movable plates to press on a respective one of two end flanges of the bellow. With the testing tool, whether a bellow is damages can be quickly and conveniently determined, whereby a significant low cost is achieved.