Patents by Inventor Lee Senecal

Lee Senecal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High Flow GaCl3 Delivery
    Publication number: 20080018004
    Abstract: The present invention is an apparatus for deliverying high purity gallium trichloride in the vapor phase to a gallium nitride reactor, comprising; a source of carrier gas at an elevated pressure; a purifier to remove moisture from the carrier gas; a heater capable of heating the carrier gas to at least 80° C.; a container having a supply of gallium trichloride, a valve controlled inlet for the carrier gas having a dip tube with an outlet below the level of the gallium trichloride, a valve controlled outlet for removing the carrier gas and entrained gallium trichloride; a heater capable of heating sufficient to melt the gallium trichloride; a delivery line connected to the valve controlled outlet for carrying the entrained gallium trichloride to a reaction zone for gallium nitride. A process is also described for the apparatus.
    Type: Application
    Filed: May 31, 2007
    Publication date: January 24, 2008
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Thomas Steidl, Charles Birtcher, Robert Clark, Lee Senecal
  • Solvents and methods using same for removing silicon-containing residues from a substrate
    Publication number: 20050196535
    Abstract: A method for the removal of residues comprising silicon from at least a portion of the top and back of a substrate and/or deposition apparatus is disclosed herein. In one aspect, there is provided a method for removing residues comprising: treating the coated substrate and/or deposition apparatus with a removal solvent.
    Type: Application
    Filed: February 18, 2005
    Publication date: September 8, 2005
    Inventors: Scott Weigel, Shrikant Khot, Rosaleen Morris-Oskanian, Steven Mayorga, James Mac Dougall, Lee Senecal
  • High purity chemical container with external level sensor and liquid sump
    Patent number: 6526824
    Abstract: A container for high purity chemicals having an externally placed level sensor to avoid contamination of such chemical and for ready serviceability and a removeable liquid out diptube to facilitate cleaning during refilling or refurbishing, both of which are situated adjacent a sump in the bottom of the container. The container can have a valved inlet and outlet and can be constructed of stainless steel which is electropolished.
    Type: Grant
    Filed: June 7, 2001
    Date of Patent: March 4, 2003
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Geoffrey L. Chase, John Eric Baker, Lee Senecal, Robert Sam Zorich, David Allen Roberts
  • HIGH PURITY CHEMICAL CONTAINER WITH EXTERNAL LEVEL SENSOR AND LIQUID SUMP
    Publication number: 20020184945
    Abstract: A container for high purity chemicals having an externally placed level sensor to avoid contamination of such chemical and for ready serviceability and a removeable liquid out diptube to facilitate cleaning during refilling or refurbishing, both of which are situated adjacent a sump in the bottom of the container. The container can have a valved inlet and outlet and can be constructed of stainless steel which is electropolished.
    Type: Application
    Filed: June 7, 2001
    Publication date: December 12, 2002
    Inventors: Geoffrey L. Chase, John Eric Baker, Lee Senecal, Robert Sam Zorich, David Allen Roberts
  • High purity chemical container with external level sensor and removable dip tube
    Publication number: 20020108670
    Abstract: A container for high purity chemicals having an externally placed level sensor to avoid contamination of such chemical and for ready serviceability and a removeable liquid out diptube to facilitate cleaning during refilling or refurbishing. The container can have a valved inlet and outlet and can be constructed of stainless steel which is electropolished.
    Type: Application
    Filed: February 12, 2001
    Publication date: August 15, 2002
    Inventors: John Eric Baker, Lee Senecal, Robert Sam Zorich, David Allen Roberts