Patents by Inventor Lee Woo Jin

Lee Woo Jin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA CVD APPARATUS HAVING NON-METAL SUSCEPTOR
    Publication number: 20080299326
    Abstract: A plasma CVD apparatus includes: a cooling susceptor for placing a substrate thereon and serving as an electrode; and a shower plate for introducing gas toward the susceptor via multiple throughholes formed therein. The shower plate serves as an electrode and is disposed in parallel to the susceptor. The cooling susceptor is made of a ceramic material provided with a cooling fluid flow path for passing a cooling fluid therethrough.
    Type: Application
    Filed: May 30, 2007
    Publication date: December 4, 2008
    Applicant: ASM JAPAN K.K.
    Inventors: Atsuki Fukazawa, Nobuo Matsuki, Lee Woo Jin, Mikio Shimizu