Patents by Inventor Lee-Yuan Chen

Lee-Yuan Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Planarization method
    Patent number: 10262869
    Abstract: A planarization method includes providing a substrate having a semiconductor structure formed thereon. A dielectric layer is formed on the substrate, and a mask layer is formed on the dielectric layer. A first chemical mechanical polishing process is performed to remove a portion of the mask layer thereby forming an opening directly over the semiconductor structure and exposing the dielectric layer. A first etching process is performed to anisotropically remove a portion of the dielectric layer from the opening. The mask layer is then removed and a second chemical mechanical polishing process is then performed.
    Type: Grant
    Filed: February 25, 2018
    Date of Patent: April 16, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Jen-Chieh Lin, Lee-Yuan Chen, Wen-Chin Lin, Chi-Lune Huang, Pi-Hung Chuang, Tai-Lin Chen, Sun-Hong Chen
  • PLANARIZATION METHOD
    Publication number: 20180277382
    Abstract: A planarization method includes providing a substrate having a semiconductor structure formed thereon. A dielectric layer is formed on the substrate, and a mask layer is formed on the dielectric layer. A first chemical mechanical polishing process is performed to remove a portion of the mask layer thereby forming an opening directly over the semiconductor structure and exposing the dielectric layer. A first etching process is performed to anisotropically remove a portion of the dielectric layer from the opening. The mask layer is then removed and a second chemical mechanical polishing process is then performed.
    Type: Application
    Filed: February 25, 2018
    Publication date: September 27, 2018
    Inventors: Jen-Chieh Lin, Lee-Yuan Chen, Wen-Chin Lin, Chi-Lune Huang, Pi-Hung Chuang, Tai-Lin Chen, Sun-Hong Chen