Patents by Inventor Lei SHA

Lei SHA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9934948
    Abstract: It is provided a magnetron-sputtering coating system including a sputtering chamber. The sputtering chamber therein includes: a set of target, formed by concatenating a plurality pieces of target; a substrate carrier, arranged to be opposite to the target set, and support a substrate to be coated with a film; and a driving device, arranged to drive the substrate carrier to reciprocate in a direction of the arrangement of the target.
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: April 3, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xiaokun Wang, Sangsoo Park, Xunze Zhang, Zhaobo Wang, Lei Sha, Guanjie Cheng, Wenjun Zhang, Hualu Wang, Qingliang Wen, Leilei Lv
  • Publication number: 20160186312
    Abstract: It is provided a magnetron-sputtering coating system including a sputtering chamber. The sputtering chamber therein includes: a set of target, formed by concatenating a plurality pieces of target; a substrate carrier, arranged to be opposite to the target set, and support a substrate to be coated with a film; and a driving device, arranged to drive the substrate carrier to reciprocate in a direction of the arrangement of the target.
    Type: Application
    Filed: June 5, 2015
    Publication date: June 30, 2016
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xiaokun WANG, Sangsoo PARK, Xunze ZHANG, Zhaobo WANG, Lei SHA, Guanjie CHENG, Wenjun ZHANG, Hualu WANG, Qingliang WEN, Leilei LV