Patents by Inventor Leif E. DeLaurentis

Leif E. DeLaurentis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aluminum deposition shield
    Patent number: 6589407
    Abstract: An aluminum deposition shield substantially improves transfer of radiated heat from within the vacuum chamber, in comparison to a stainless steel deposition shield. The aluminum deposition shield remains cooler during wafer processing and assists in cooling the chamber components.
    Type: Grant
    Filed: May 23, 1997
    Date of Patent: July 8, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Anantha Subramani, Ashok K. Das, Leif E. DeLaurentis, Michael Rosenstein