Patents by Inventor Leijian Yu

Leijian Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and Method for Wafer Oxide Removal and Reflow Treatment
    Publication number: 20240282734
    Abstract: The present invention relates to an apparatus and method for wafer oxide removal and reflow treatment. In particular, the present invention relates to an apparatus for wafer oxide removal and reflow treatment, comprising: a heating plate, a sample plate for supporting a wafer sample above the heating plate, and an electron attachment pin plate above the sample plate, wherein the heating plate is configured to be capable of moving up and down, and contacting and heating the sample plate.
    Type: Application
    Filed: February 17, 2023
    Publication date: August 22, 2024
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Liang Wu, Wenshan Pang, Lulu Qi, Xiang Yu, Leijian Yu, Jiong Chen, Gregory Khosrov Arslanian, Yuxiang Zhou