Abstract: A planar semiconductor device having a heavily doped channel stopper region of the first conductivity type and at least the following components: a Zener diode having the following regions, seen from an upper surface of the device, an upper diode region of the second conductivity type, a lightly doped first upper component region, of the first conductivity type, in which the upper diode region and the channel stopper region are formed at the upper surface, and a heavily doped lower component region of the first conductivity type; and a component having a second upper component region formed with the upper diode region in the first upper component region at the upper surface and having the same conductivity type as the upper diode region, the first upper component region, the lower component region, and a third upper component region of the first conductivity type and formed in the second upper component region at the upper surface of the device.

Abstract: In a semiconductor component, in particular, a high-voltage transistor, with an oxygen doped or nitrogen doped silicon layer on the surface, a glass layer is provided between the doped silicon layer and the semi-conductor surface.