Abstract: A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

Abstract: A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.

Abstract: A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open position of the regulating vacuum valve in which it is raised from the valve seat, an adjusting device which has a drive unit for adjusting the closure member over the control path, a carrying unit which carries the closure member and is supported so as to be displaceable relative to the closure member. The carrying unit is arranged in the through-channel and is secured to the valve body, and the carrying unit has a chamber which is sealed relative to the through-channel and in which the adjusting device or at least a portion thereof is arranged.

Abstract: A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open position of the regulating vacuum valve in which it is raised from the valve seat, an adjusting device which has a drive unit for adjusting the closure member over the control path, a carrying unit which carries the closure member and is supported so as to be displaceable relative to the closure member. The carrying unit is arranged in the through-channel and is secured to the valve body, and the carrying unit has a chamber which is sealed relative to the through-channel and in which the adjusting device or at least a portion thereof is arranged.

Abstract: A control apparatus for controlling gas flow in a molecular region including a housing, having a through-channel, and a control plate displaceable in its plane between an open position, in which the plate is located sidewise of the through-channel, and a closed position, in which the control plate crosses the through-channel, the control plate having a circumferential edge at least a portion of which is received in a groove circumscribing the through-channel, with the received portion having a profile which is offset backward or projects out with respect to the cross-sectional profile of the through-channel, and with the received portion having a diminished cross-sectional profile in comparison with the remaining edge portion.

Abstract: A measuring head has a coil and a contact part for contacting an insulating layer whose thickness is to be measured. The construction and arrangment of the coil are so chosen that in the region of the end face of the contact part, the geometric locations of the points of the conductor which produce an identical change in inductance of the coil lie on concentric circles. The end face of the contact part has a contour which conforms to these concentric circles. Measurement of the thickness of an insulating layer such as a cable sheath thereby becomes independent of the relative position between the measuring head and the material being measured. Accurate guidance of the cable is no longer necessary.