Abstract: A method for the electrical zero balancing of a micro mechanical component including a first capacitor electrode rigidly suspended over a substrate, a second capacitor electrode rigidly suspended over the substrate, and a third capacitor electrode disposed there between, resiliently and deflectably suspended over the substrate, as well as a differential-capacitance detector for measuring a differential capacitance of the capacitances of the variable capacitors configured in this manner. In this context, a first electric potential is applied to the first capacitor electrode; a second electric potential is applied to the second capacitor electrode; a third electric potential is applied to the third capacitor electrode; and a fourth electric potential is applied to the substrate. The fourth electrical potential applied to the substrate for the electrical zero-point balancing is changed for the operation of the differential-capacitance detector.

Abstract: A circuit for evaluating electrical signals having a programmable adjustment is described. The circuit includes an analog output for signals that have been evaluated which can be used to program the adjustment.

Abstract: An amplifier is connected to a voltage subtractor which is connected in a predetermined current path of the amplifier to adjust the temperature-dependent voltage offset of an amplifier or of an amplifier chain. If the voltage subtractor is connected at the output of the amplifier or of an amplifier chain, then the temperature-dependent offset voltage can be subtracted using suitable means, without the amplifier itself having to be compensated. As a voltage subtractor, an operational amplifier is proposed, in the case of which the offset voltage is subtracted by means of negative feedback. The negative feedback is produced by means of a resistor having two current power sources. The voltage subtractor is preferably connected in outgoing circuit to the amplifier and constructed in accordance with the same layout rules.

Abstract: In a circuit arrangement, in particular for a capacitive acceleration sensor having a first capacitor and a second capacitor, the two capacitors have a common middle electrode, which is movably supported in dependence upon an acting acceleration. A position-control circuit applies a voltage to the outer electrodes of the capacitors so as to keep the capacitors equal in size. An a.c. voltage is applied to the middle electrode and the a.c. current adjusting itself at the capacitors is evaluated for purposes of position control.