Patents by Inventor Leo Tarhay

Leo Tarhay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5011706
    Abstract: The invention is a method of forming a continuous coating of amorphous silicon carbide on the surface of articles by plasma enhanced chemical vapor deposition. In the method, the chemical vapor comprises a silicon-containing cyclobutane, such as a silacyclobutane or a 1,3-disilacyclobutane. The coatings formed by the invention are useful for application to solar cells, for preventing corrosion of electronic devices, for forming interlevel dielectric layers between metallization layers of electronic devices, and for providing abrasion resistance to surfaces.
    Type: Grant
    Filed: April 12, 1989
    Date of Patent: April 30, 1991
    Assignee: Dow Corning Corporation
    Inventors: Leo Tarhay, Kenneth G. Sharp
  • Patent number: 5008320
    Abstract: This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 7, 1989
    Date of Patent: April 16, 1991
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4911992
    Abstract: This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 4, 1986
    Date of Patent: March 27, 1990
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4898907
    Abstract: This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: October 27, 1988
    Date of Patent: February 6, 1990
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4849296
    Abstract: Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium, and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
    Type: Grant
    Filed: December 28, 1987
    Date of Patent: July 18, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4847162
    Abstract: Hydrogen silsesquioxane resin can be ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a ceramic coating on the surface of a substrate. The nitrified silica coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided silica with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
    Type: Grant
    Filed: December 28, 1987
    Date of Patent: July 11, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4842888
    Abstract: Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example alkoxides, of aluminum, titanium, or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the nitrided ceramic SiO.sub.2 /metal oxide coating for still further protection of electronic devices.
    Type: Grant
    Filed: April 7, 1988
    Date of Patent: June 27, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4826733
    Abstract: A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.
    Type: Grant
    Filed: December 3, 1986
    Date of Patent: May 2, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Sarah S. Snow, Leo Tarhay, Ronald H. Baney
  • Patent number: 4822697
    Abstract: This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 3, 1986
    Date of Patent: April 18, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4808653
    Abstract: This invention relates to materials produced by diluting in a solvent a preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: March 10, 1988
    Date of Patent: February 28, 1989
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4756977
    Abstract: This invention relates to materials produced by diluting in a solvent a hydrogen silsesquioxane resin solvent solution which is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 3, 1986
    Date of Patent: July 12, 1988
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4753855
    Abstract: This invention relates to materials produced by diluting in a solvent a preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 4, 1986
    Date of Patent: June 28, 1988
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4753856
    Abstract: This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: January 2, 1987
    Date of Patent: June 28, 1988
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay
  • Patent number: 4749631
    Abstract: This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester which is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
    Type: Grant
    Filed: December 4, 1986
    Date of Patent: June 7, 1988
    Assignee: Dow Corning Corporation
    Inventors: Loren A. Haluska, Keith W. Michael, Leo Tarhay