Patents by Inventor Leon Marie Van Den Schoor

Leon Marie Van Den Schoor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, device manufacturing method, and use of a radiation collector
    Publication number: 20070085043
    Abstract: A lithographic apparatus, comprising a collector being constructed to receive radiation from a radiation source and transmit radiation to an illumination system, wherein the collector is provided with at least one fluid duct, the apparatus including a temperature conditioner to thermally condition the collector utilizing the fluid duct of the collector, the temperature conditioner being configured to feed a first fluid to the fluid duct during a first period, and to feed a second fluid to the fluid duct during at least a second period
    Type: Application
    Filed: October 19, 2005
    Publication date: April 19, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Leonardus Franken, Alexander Struycken, Leon Marie Van Den Schoor