Abstract: A substrate processing tool includes a plurality of process modules configured to process a semiconductor substrate. Each of the plurality of process modules is arranged at a different location within the substrate processing tool. A vacuum transfer module (VTM) includes a robot and is configured to move between a plurality of different positions corresponding to the different locations within the substrate processing tool to allow the robot to access respective ones of the plurality of process modules.

Abstract: A substrate processing tool includes a plurality of process modules configured to process a semiconductor substrate. Each of the plurality of process modules is arranged at a different location within the substrate processing tool. A vacuum transfer module (VTM) includes a robot and is configured to move between a plurality of different positions corresponding to the different locations within the substrate processing tool to allow the robot to access respective ones of the plurality of process modules.

Abstract: Apparatus for supporting the lower elbow assembly of a jet pump in a reactor pressure vessel (RPV) of a nuclear reactor are described. The clamp apparatus includes a lower clamp element and an upper clamp element. The upper and lower elements are configured to be positioned at the interface between the thermal sleeve and the jet pump riser elbow. The upper and lower elements include extended ridges that are configured to fit in circumferential grooves precisely machined into the sleeve-elbow assembly on opposing sides of the interface.

Abstract: A guide nozzle for feeding multiple fusible filler metal wires into reduced-width, high-aspect-ratio (ratio of depth to width) metallic joints with control and stability of the filler metal position as it enters the molten pool area. The multiple filler wires are fed concurrently at the same or different feed rates. The guide nozzle is fabricated by flattening a circular tube into an oval or elliptical shape. In the case when the filler wires have the same diameter, the resulting oval or elliptical hole in the guide nozzle has a height greater than two times the diameter of the filler wires and a width greater than one diameter but less than two times the diameter of the filler wire. Alternatively, the guide nozzle is formed by forming a flat side on each of two circular tubes and then joining the flat sides together. Each tube has a circular hole of diameter greater than the diameter of the filler wire to be guided therein.

Abstract: A hot-wire nozzle for feeding pre-heated filler material into a welding groove. The nozzle has a contact tube made of electrically conductive material surrounded by a thin structural outer sheath. The outer sheath is electrically insulated from the contact tube by means of layers of electrically insulating material sandwiched between the contact tube and the outer sheath. The contact tube is configured to feed two or more filler wires simultaneously.