Abstract: This invention is the electron beam evaporation and deposition(EBED) process which produces high purity and ultrafine grain size in high-temperature and reactive metal alloys. These properties are important in metals used in aircraft gas turbine components operating under high-cycle fatigue conditions at up to 1250.degree. C. Ingots produced by current melting, remelting and refining methods whose properties are to be improved are placed in a vacuum chamber and evaporated by an electron beam. The resulting vapor is condensed on a starting pad to form the product ingot with the desired improved properties. The desired shape and size of the product ingot is achieved by controlling the motion of the movable rod on which the starting pad is placed. Proven increases in fatigue life have been obtained with an alloy of chromium, cobalt and molybdenum by use of the EBED process.