Abstract: A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is located relative to the field emission tip and the intermediate electrode to effect a predetermined focal distance and level of electron beam intensity. Use of a field electrode permits utilization of lower focusing and acceleration voltages and renders the device less sensitive to variations in field emission tip design and performance.

Abstract: In a field emission charged particle microscope having a housing defining a vacuum chamber, a field emission tip disposed in the chamber for generating charged particles, electrode means for establishing electrostatic focusing and accelerating field for forming a beam of charged particles, field electrode means in juxtaposition with the tip for developing an electrostatic field for extraction of charged particles generated by the tip and voltage means connected to the electrode means and the tip for supplying electrical potential thereto to establish the electrostatic fields, the inclusion of an apertured, conductive symmetrical glass resistor disposed intermediate the field electrode means and the electrode means for establishing the focusing and accelerating field, and in electrical contact therewith.

Abstract: A field emission gun for use in an instrument such as an electron microscope including the field emission tip, an extraction electrode and focusing and accelerating anode means wherein there is disposed between the tip and the accelerating field of the anode means an electric field of a strength expressed in terms of electron voltage, at least equal to the lowest energy secondary electron sought to be prevented from entering the accelerating field.

Abstract: A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is located relative to the field emission tip and the intermediate electrode to effect a predetermined focal distance and level of electron beam intensity. Use of a field electrode permits utilization of lower focusing and acceleration voltages and renders the device less sensitive to variations in field emission tip design and performance.

Abstract: A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is located relative to the field emission tip and the intermediate electrode to effect a predetermined focal distance and level of electron beam intensity. Use of a field electrode permits utilization of lower focusing and acceleration voltages and renders the device less sensitive to variations in field emission tip design and performance.