Patents by Inventor Leonard Vincent Interrante

Leonard Vincent Interrante has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low dielectric constant films derived by sol-gel processing of a hyperbranched polycarbosilane
    Patent number: 6809041
    Abstract: A hybrid organic/inorganic organosilicon networked polymer material having a compositional formula [Si(O)CH2]n and a dielectric constant of less than 2.4 is provided. The material may be used as an interlayer dielectric film in a semiconductor device. The film is preferably fabricated by a sol-gel process using an alkoxy substituted hyperbranched polycarbosilane precursor material.
    Type: Grant
    Filed: January 10, 2003
    Date of Patent: October 26, 2004
    Assignee: Rensselaer Polytechnic Institute
    Inventors: Leonard Vincent Interrante, Ning Lu
  • Low dielectric constant films derived by sol-gel processing of a hyperbranched polycarbosilane
    Publication number: 20040000715
    Abstract: A hybrid organic/inorganic organosilicon networked polymer material having a compositional formula [Si(O)CH2]n and a dielectric constant of less than 2.4 is provided. The material may be used as an interlayer dielectric film in a semiconductor device. The film is preferably fabricated by a sol-gel process using an alkoxy substituted hyperbranched polycarbosilane precursor material.
    Type: Application
    Filed: January 10, 2003
    Publication date: January 1, 2004
    Applicant: Rensselaer Polytechnic Institute
    Inventors: Leonard Vincent Interrante, Ning Lu