Patents by Inventor Leonard Wamboldt

Leonard Wamboldt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for depositing metal oxide films
    Patent number: 5338422
    Abstract: A triple magnetron array positioned inside a vacuum chamber is provided. The array includes a planar magnetron situated above dual rotatable unbalanced cylindrical magnetrons. The planar magnetron is partially shielded from the dual magnetrons by a baffle. An inert gas outlet is positioned near the planar magnetron target whereas oxygen gas outlets are positioned near the cylindrical magnetrons. In this fashion, the reactive gas flow to the planar magnetron is restricted. The system is particularly well suited for forming metal oxide films, such as titanium oxide, that are difficult to deposit by conventional means. The oxygen flow rate is controlled so that the planar magnetron operates in the metallic mode.
    Type: Grant
    Filed: September 29, 1992
    Date of Patent: August 16, 1994
    Assignee: The BOC Group, Inc.
    Inventors: Abraham I. Belkind, Leonard Wamboldt, Jesse D. Wolfe