Patents by Inventor Leonardus Verstappen

Leonardus Verstappen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device manufacturing method and computer program product
    Publication number: 20070141486
    Abstract: In a double exposure process to print features at a reduced pitch, the critical dimension of features printed in the first exposure is measured and used as a target for the second exposure.
    Type: Application
    Filed: December 21, 2005
    Publication date: June 21, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Leonardus Verstappen, Everhardus Mos