Patents by Inventor Leong Theng Wei

Leong Theng Wei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cmp Slurry Strainer
    Publication number: 20070262030
    Abstract: A slurry strainer for tungsten CMP. It is made of PVDF and has a lower, plug portion for close fitting into the top of a drain and an upper, convex portion that sits on top of the drain, with a larger diameter than the drain itself. Debris rolls off the top of the strainer, rather than blocking its through-holes. A lip around the edge improves air flow.
    Type: Application
    Filed: September 24, 2003
    Publication date: November 15, 2007
    Applicant: Systems on Silicon Manufacturing Co. Pte. Ltd.
    Inventors: Koh Meng Fei, Poh Choon Siong, Leong Theng Wei