Patents by Inventor Leonhard Bogl

Leonhard Bogl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4690098
    Abstract: In a vacuum vapor-deposition system a substrate holder is arranged stationary in the main part of a vapor-deposition chamber. Evaporation apparatuses are arranged on the floor of the vapor-deposition chamber, which is moveably connected to the main part of the vacuum-deposition chamber via a bellows and can swivel about two mutually intersecting axes or be displaced along two mutually intersecting axes with respect to the main part by means of two drive mechanisms. In this way the thermostatization of the substrate and the production of very uniform layers is facilitated.
    Type: Grant
    Filed: October 29, 1985
    Date of Patent: September 1, 1987
    Assignees: ATOMIKA Technische Physik GmbH, Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventors: Horst M. Mertens, Leonhard Bogl