Patents by Inventor Leonid Vasilyev

Leonid Vasilyev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of operating a probe microscope
    Publication number: 20050194534
    Abstract: A method of improving the precision and speed of probe microscopy. Direct geometric measurement of relevant date points allows more rapid determination of critical dimensions while improving measurement precision through minimized system drift. Precision and throughput is further improved by deflection-based measurement. Sensitivity to soft contacts is improved by using diagonal approach trajectories for the probe tip (20). And throughput is improved while risk of damage to tip and/or surface is reduced by using lateral force detection.
    Type: Application
    Filed: January 14, 2005
    Publication date: September 8, 2005
    Inventors: Eric Kneedler, Robert Linder, Leonid Vasilyev, Andreas Berghaus, Charles Bryson
  • Step function determination of Auger peak intensity
    Patent number: 6635869
    Abstract: An electron analyzer and its method of operation useful for determining the intensity of a peak in the electron spectrum. The invention is particularly useful for determining the intensity of an Auger peak of a given element in the sample being probed and associating the intensity with a concentration of that element in the sample. The electron spectrum is measured above and below the anticipated peak. The data near the peak are not used. The remaining data above the peak and below the peak are fit to respective equations linearly dependent upon the measurement energy. The difference of the two equations at the value of the peak energy is associated with the peak intensity and the elemental concentration. The invention can be applied to measuring nitrogen concentration in a thin protective film of amorphous carbon or diamond.
    Type: Grant
    Filed: February 26, 2001
    Date of Patent: October 21, 2003
    Assignee: FEI Company
    Inventors: Dimitri Klyachko, Sergey Borodyansky, Leonid Vasilyev
  • Step function determination of auger peak intensity
    Publication number: 20020145111
    Abstract: An electron analyzer and its method of operation useful for determining the intensity of a peak in the electron spectrum. The invention is particularly useful for determining the intensity of an Auger peak of a given element in the sample being probed and associating the intensity with a concentration of that element in the sample. The electron spectrum is measured above and below the anticipated peak. The data near the peak are not used. The remaining data above the peak and below the peak are fit to respective equations linearly dependent upon the measurement energy. The difference of the two equations at the value of the peak energy is associated with the peak intensity and the elemental concentration. The invention can be applied to measuring nitrogen concentration in a thin protective film of amorphous carbon or diamond.
    Type: Application
    Filed: February 26, 2001
    Publication date: October 10, 2002
    Inventors: Dimitri Klyachko, Sergey Borodyansky, Leonid Vasilyev