Patents by Inventor Les Wojnowski

Les Wojnowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes
    Patent number: 9355776
    Abstract: Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
    Type: Grant
    Filed: April 9, 2014
    Date of Patent: May 31, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Carl Johnson, Les Wojnowski, Lawrence A. Ringor, Jeffrey Ludwig
  • CAPACITOR ASSEMBLIES FOR COUPLING RADIO FREQUENCY (RF) AND DIRECT CURRENT (DC) ENERGY TO ONE OR MORE COMMON ELECTRODES
    Publication number: 20150294790
    Abstract: Embodiments of a capacitor assembly for coupling radio frequency (RF) and direct current (DC) power to an electrode and substrate support incorporating same are provided herein. In some embodiments, the capacitor assembly includes a first conductive plate to receive RF power from an RF power source, the first conductive plate including a central bore; at least one capacitor coupled to the first conductive plate and surrounding the central bore; and a second conductive plate electrically coupled to the first conductive plate via the at least one capacitor, the second conductive plate including an input tap to receive DC power from a DC power source and at least one output tap to couple the RF and DC power to an electrode.
    Type: Application
    Filed: April 9, 2014
    Publication date: October 15, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Carl Johnson, Les Wojnowski, Lawrence A. Ringor, Jeffrey Ludwig