Abstract: A resistance thermometer element having a thin layer of platinum metal on an insulating substrate is formed by magnetron sputtering in a gaseous atmosphere containing at least 10% by volume of oxygen. Any balance gas has less than 10% by volume of argon, krypton and xenon. The atmosphere may have up to 100% oxygen with any balance gas being inert to platinum. Air can be used. A planar magnetron may be used.

Abstract: A layer of a carbonaceous material is applied to a surface by connecting the surface through capacitive means to a radio frequency source, and simultaneously exposing the surface to a plasma generated in a hydrocarbon gas.

Abstract: In apparatus for sensing and controlling the deposition of a thin film on to a substrate (12) from a gas or vapor phase, the optical reflectance or transmittance is sensed, the resonant frequency of a crystal (14) also exposed to the deposition is sensed, and the quotient of the change in each signal over a predetermined time interval is determined. The deposition can be terminated at a suitable thickness, for example a reflectance or transmittance maximum or minimum. Instead of an optical property, the electrical resistivity of the film may be sensed and used in the same way.