Patents by Inventor Leslie L. Deck

Leslie L. Deck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10267617
    Abstract: Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: April 23, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10190871
    Abstract: A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: January 29, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Publication number: 20180180412
    Abstract: An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
    Type: Application
    Filed: January 31, 2018
    Publication date: June 28, 2018
    Inventors: Peter J. de Groot, Leslie L. Deck
  • Publication number: 20180143002
    Abstract: A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
    Type: Application
    Filed: November 8, 2017
    Publication date: May 24, 2018
    Inventor: Leslie L. Deck
  • Patent number: 9891078
    Abstract: Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: February 13, 2018
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Jan Liesener
  • Publication number: 20170356739
    Abstract: A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
    Type: Application
    Filed: June 7, 2017
    Publication date: December 14, 2017
    Inventor: Leslie L. Deck
  • Publication number: 20170191821
    Abstract: Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
    Type: Application
    Filed: December 19, 2016
    Publication date: July 6, 2017
    Inventor: Leslie L. Deck
  • Publication number: 20160011016
    Abstract: Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.
    Type: Application
    Filed: July 14, 2015
    Publication date: January 14, 2016
    Inventors: Leslie L. Deck, Jan Liesener
  • Patent number: 9115975
    Abstract: An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.
    Type: Grant
    Filed: October 3, 2013
    Date of Patent: August 25, 2015
    Assignee: Zygo Corporation
    Inventors: Jan Liesener, Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander D. Wesley
  • Patent number: 8988690
    Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: March 24, 2015
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Peter J. de Groot, Michael Schroeder
  • Publication number: 20150002852
    Abstract: Low-coherence scanning systems and methods for operating the same include simultaneously measuring two phase-shifted interferograms corresponding to intensity patterns produced by interfering test light reflected from a test object with reference light on respective first and second detectors, in which the test light and reference light are derived from a common source. The interferograms measured by the first detector define a first set of scanning interferometry signals, and the interferograms measured by the second detector define a second set of interferometry signals corresponding to substantially the same multiple transverse locations on the test object, in which each interferometry signal in the second set is phase-shifted relative to a corresponding interferometry signal in the first set. An electronic processor processes the first set and second set of interferometry signals either independently from each other or in a combined manner to obtain information about the test object.
    Type: Application
    Filed: June 24, 2014
    Publication date: January 1, 2015
    Inventors: Peter J. de Groot, Leslie L. Deck
  • Patent number: 8902431
    Abstract: A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: December 2, 2014
    Assignee: Zygo Corporation
    Inventors: Jan Liesener, Mark Davidson, Peter J. de Groot, Xavier M. Colonna de Lega, Leslie L. Deck
  • Publication number: 20140098375
    Abstract: An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated.
    Type: Application
    Filed: October 3, 2013
    Publication date: April 10, 2014
    Inventors: Jan Liesener, Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander D. Wesley
  • Patent number: 8670127
    Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    Type: Grant
    Filed: December 14, 2011
    Date of Patent: March 11, 2014
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Peter J. de Groot, Michael Schroeder
  • Publication number: 20140049782
    Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    Type: Application
    Filed: October 2, 2013
    Publication date: February 20, 2014
    Applicant: Zygo Corporation
    Inventors: Leslie L. Deck, Peter J. de Groot, Michael Schroeder
  • Publication number: 20130155413
    Abstract: A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source.
    Type: Application
    Filed: February 13, 2013
    Publication date: June 20, 2013
    Applicant: Zygo Corporation
    Inventors: Jan Liesener, Mark Davidson, Peter J. de Groot, Xavier Colonna de Lega, Leslie L. Deck
  • Patent number: 8379218
    Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine in
    Type: Grant
    Filed: August 31, 2009
    Date of Patent: February 19, 2013
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Peter De Groot, Mark Davidson, Jan Liesener, Xavier Colonna De Lega
  • Patent number: 8300233
    Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    Type: Grant
    Filed: February 16, 2011
    Date of Patent: October 30, 2012
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Peter J. De Groot, Michael Schroeder
  • Publication number: 20120170048
    Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    Type: Application
    Filed: December 14, 2011
    Publication date: July 5, 2012
    Applicant: ZYGO CORPORATION
    Inventors: Leslie L. Deck, Peter J. De Groot, Michael Schroeder
  • Patent number: 8120781
    Abstract: In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.
    Type: Grant
    Filed: July 24, 2009
    Date of Patent: February 21, 2012
    Assignee: Zygo Corporation
    Inventors: Jan Liesener, Mark Davidson, Peter J De Groot, Xavier Colonna De Lega, Leslie L. Deck