Abstract: A method is described that involves measuring a first set of interferometer fringe line disturbances against pre-determined measurement scale information in order to generate a first set of profiles that describe the topography of a sample that is placed upon a sample stage associated with the interferometer. The first set of profiles map to traces that run over a first axis of the sample and the sample stage. The traces have a recognized spacing between one another along a second axis of the sample and the sample stage. The method also involves adjusting the relative position of the traces to the sample so as to create a second set of fringe line disturbances. The method also involves measuring, the second set of interferometer fringe line disturbances against the pre-determined measurement scale information in order to generate a second set of profiles that describe the topography of the sample.

Abstract: A method is described that involves tracking a fringe line disturbance that has breached its field of reference. The method also involves translating each pixel location of the tracked fringe line disturbance to an x,y,zs data point. x and y represent a position on the plane of an interferometer's sample stage. zs represents the height of a sample above the x,y position. The sample is placed upon the sample stage of an inteferometer so as to create the fringe line disturbance. The fringe line disturbance is observed on the interferometer's detector.

Abstract: A method is described that involves tracking a fringe line disturbance that has breached its field of reference. The method also involves translating each pixel location of the tracked fringe line disturbance to an x,y,zs data point. x and y represent a position on the plane of an interferometer's sample stage. zs represents the height of a sample above the x,y position. The sample is placed upon the sample stage of an inteferometer so as to create the fringe line disturbance. The fringe line disturbance is observed on the interferometer's detector.

Abstract: A method is described that involves storing information that identifies traces along a sample stage that a plurality of fringe lines detected on an detector map to. The detector is part of an interferometer. The method also involves storing a parameter that can be used to translate positional disturbances of the fringe lines into a plurality of topographical profiles of the sample along the traces; where, the positional disturbances of the fringe lines are: 1) caused by a sample being placed upon said sample stage, and, 2) are observed on the detector.

Abstract: A method is described that involves varying the wavelength of an interferometer light source and determining changes in reflectivity of a sample placed upon a sample stage of the interferometer. The changes are responsive to the varying so as to outline a reflectivity vs. wavelength curve for the sample. The method further involves characterizing the sample as being comprised of a certain material or substance because the outline appears to match a reflectivity vs. wavelength curve for the material or substance.

Abstract: A method is described that involves measuring a first set of interferometer fringe line disturbances against pre-determined measurement scale information in order to generate a first set of profiles that describe the topography of a sample that is placed upon a sample stage associated with the interferometer. The first set of profiles map to traces that run over a first axis of the sample and the sample stage. The traces have a recognized spacing between one another along a second axis of the sample and the sample stage. The method also involves adjusting the relative position of the traces to the sample so as to create a second set of fringe line disturbances. The method also involves measuring, the second set of interferometer fringe line disturbances against the pre-determined measurement scale information in order to generate a second set of profiles that describe the topography of the sample.

Abstract: A quality control system provides for real-time, high-speed, high-resolution, comparison of the three-dimensional form of a sample with that of an examplar. The quality inspection system includes a sample analyzer, an exemplar analyzer, a comparator, a controller and a position memory. The sample analyzer includes a sample imager for providing an interferometric image of a sample of inspection, a sample scanner for scanning the sample image, and a sample transducer for converting the resulting sample scan into a sample signal representing the three-dimensional form of the sample. The exemplar analyzer similarly includes an exemplar imager, an exemplar scanner and an exemplar transducer to provide an exemplar signal representing an exemplary three-dimensional form for said sample. The comparator provides a comparison signal which identifies the scan times during which differences between the sample signal and the exemplar signal are detected.