Patents by Inventor Lev Fris Man

Lev Fris Man has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for local vectorial particle cleaning
    Patent number: 6566169
    Abstract: Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
    Type: Grant
    Filed: October 16, 2001
    Date of Patent: May 20, 2003
    Assignee: Oramir Semiconductor Equipment Ltd.
    Inventors: Yoram Uziel, Natalie Levinsohn, David Yogev, Yehuda Elisha, Yitzhak Ofer, Lev Fris Man, Jonathan Baron