Patents by Inventor Lev Haikoviz

Lev Haikoviz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dark field inspection system
    Patent number: 7339661
    Abstract: Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
    Type: Grant
    Filed: September 8, 2003
    Date of Patent: March 4, 2008
    Inventors: Doron Korngut, Erez Admoni, Ofer Kadar, Lev Haikoviz, Haim Feldman, Avishay Guetta
  • Dark field inspection system
    Publication number: 20050219518
    Abstract: Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
    Type: Application
    Filed: September 8, 2003
    Publication date: October 6, 2005
    Inventors: Doron Korngut, Erez Admoni, Ofer Kadar, Lev Haikoviz, Haim Feldman, Avishay Guetta