Abstract: A six-degree-of-freedom magnetic levitation positioning system includes a levitated platform, six impelling coils disposed adjacent to the platform, and six permanent magnets attached to the platform such that each of the permanent magnets is adjacent to and magnetically aligned with a respective one of the impelling coils, whereby there are six magnet-coil sets. Among the six sets, three of the sets are maglev sets in which magnetic axes of the impelling coils are generally vertically aligned, and another three of the sets are horizontal impelling sets in which magnetic axes of the impelling coils are generallv horizontally aligned. The magnetic axes of the three horizontal impelling sets are all mutually non-parallel, so that elevation and tiltings of the platform can be actuated by adjusting the currents in coils of the three maglev sets, and translations and rotations about a vertical axis of the platform can be actuated by adjusting the currents in coils of the three horizontal impelling sets.