Abstract: A method includes receiving a substrate having a front side and a back side, forming a shallow trench in the substrate from the front side, forming a liner layer including a first dielectric material in the shallow trench, depositing a second dielectric material different from the first dielectric material on the liner layer to form an isolation feature in the shallow trench, forming an active region surrounded by the isolation feature, forming a gate stack on the active region, forming a source/drain (S/D) feature on the active region and on a side of the gate stack, thinning down the substrate from the back side such that the isolation feature is exposed, etching the active region to expose the S/D feature from the back side to form a backside trench, and forming a backside via feature landing on the S/D feature and surrounded by the liner layer.

Abstract: A coaxial transmitter optical subassembly (TOSA) including an optical fiber coupling receptacle coupled to a laser package may be used in an optical transceiver for transmitting an optical signal at a channel wavelength. The optical fiber coupling receptacle may include a housing having a first open end to receive a ferrule-terminated optical fiber. The receptacle may also include a fiber-coupling ferrule holding an optical fiber segment and secured within the housing to optically couple the optical fiber segment to a laser of the TOSA through a second open end of the housing opposite the first open end. The receptacle may further include a sleeve disposed on an interior surface of the housing to provide a cavity to secure the ferrule-terminated optical fiber and align the optical fiber to the optical fiber segment.

Abstract: A coaxial transmitter optical subassembly (TOSA) including an optical fiber coupling receptacle coupled to a laser package may be used in an optical transceiver for transmitting an optical signal at a channel wavelength. The optical fiber coupling receptacle may include a housing having a first open end to receive a ferrule-terminated optical fiber. The receptacle may also include a fiber-coupling ferrule holding an optical fiber segment and secured within the housing to optically couple the optical fiber segment to a laser of the TOSA through a second open end of the housing opposite the first open end. The receptacle may further include a sleeve disposed on an interior surface of the housing to provide a cavity to secure the ferrule-terminated optical fiber and align the optical fiber to the optical fiber segment.

Abstract: An optical coupling element, for coupling a light emitting element to a light transmission element, includes a light guide element. The light guide element has a light incident part, a total reflection surface and a light output part. The light incident path is formed at the light incident part corresponding to the light emitting element. The light reflection path is formed at the light output part corresponding to the light transmission element. The first included angle ?1 is formed between the light incident path and the total reflection surface and is not equal to 45 degrees. The light emitting element is adapted to emit a beam toward the total reflection surface along the light incident path by passing through the light guide element from the light incident part. Moreover, the beam is reflected by the total reflection surface and is outputted toward the light transmission element.

Abstract: An optical coupling element, for coupling a light emitting element to a light transmission element, includes a light guide element. The light guide element has a light incident part, a total reflection surface and a light output part. The light incident path is formed at the light incident part corresponding to the light emitting element. The light reflection path is formed at the light output part corresponding to the light transmission element. The first included angle ?1 is formed between the light incident path and the total reflection surface and is not equal to 45 degrees. The light emitting element is adapted to emit a beam toward the total reflection surface along the light incident path by passing through the light guide element from the light incident part. Moreover, the beam is reflected by the total reflection surface and is outputted toward the light transmission element.