Patents by Inventor Li-Chien Tseng

Li-Chien Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESS SYSTEM INCLUDING A COOLING STATION
    Publication number: 20230138317
    Abstract: An apparatus for semiconductor processing is provided. The apparatus includes a housing comprising a plurality of shelves configured to receive a plurality of substrates; a shelter plate disposed over an upper side of the housing and configured to reduce heat loss of an upper substrate of the plurality of substrates; and an airflow structure in the housing and configured to control an air circulation in the housing.
    Type: Application
    Filed: January 16, 2022
    Publication date: May 4, 2023
    Inventors: Li-Chien Tseng, Ming-Shiou Kuo