Abstract: A method for determining tool assignment preference applied to a semiconductor manufacturing system. At least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools are provided. Demand moves provided by the first and second semiconductor processes are calculated. Assignment preferences of the first and second tools are determined using a statistical method. The statistical method is a two-step data feedback method, comprising the steps of, in the first step, calculating assignment preferences of tools without setting assignment preferences, and, in the second step, assigning assignment preferences to the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

Abstract: A method for determining tool assignment preference applied to a semiconductor manufacturing system. At least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools are provided. Demand moves provided by the first and second semiconductor processes are calculated. Assignment preferences of the first and second tools are determined using a statistical method. The statistical method is a two-step data feedback method, comprising the steps of, in the first step, calculating assignment preferences of tools without setting assignment preferences, and, in the second step, assigning assignment preferences to the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.