Patents by Inventor Li-Guo LEE

Li-Guo LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11217548
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Grant
    Filed: December 13, 2018
    Date of Patent: January 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 11145613
    Abstract: Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a resist layer having an opening over the metal layer. The method for forming a semiconductor structure further includes forming a conductive pillar and a solder layer over the conductive pillar in the opening of the resist layer and removing the resist layer. The method for forming a semiconductor structure further includes removing a portion of the conductive pillar so that the conductive pillar has an angled sidewall.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: October 12, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Publication number: 20190131264
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Application
    Filed: December 13, 2018
    Publication date: May 2, 2019
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Publication number: 20190019772
    Abstract: Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a resist layer having an opening over the metal layer. The method for forming a semiconductor structure further includes forming a conductive pillar and a solder layer over the conductive pillar in the opening of the resist layer and removing the resist layer. The method for forming a semiconductor structure further includes removing a portion of the conductive pillar so that the conductive pillar has an angled sidewall.
    Type: Application
    Filed: September 7, 2018
    Publication date: January 17, 2019
    Inventors: Li-Guo LEE, Yung-Sheng LIU, Yi-Chen LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Patent number: 10163843
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 10090267
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a metal pad formed over the first substrate. The semiconductor structure further includes a modified conductive pillar having a top portion and a bottom portion formed over the metal pad and a solder layer formed over the modified conductive pillar. In addition, the top portion of the modified conductive pillar has a first sidewall in a first direction and a bottom portion of the modified conductive pillar has a second sidewall in a second direction different from the first direction.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: October 2, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 9997482
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a metal pad formed over the first substrate. The semiconductor structure further includes a solder stud formed over the metal pad, and the solder stud has a flat top surface parallel to a top surface of the first substrate.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: June 12, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Guo Lee, Yi-Chen Liu, Yung-Sheng Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Publication number: 20180068967
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Application
    Filed: October 27, 2017
    Publication date: March 8, 2018
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Publication number: 20180033756
    Abstract: Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a polymer layer over the metal pad. The method for forming a semiconductor structure further includes forming a seed layer over the metal pad and extending over the polymer layer and forming a conductive pillar over the seed layer. The method for forming a semiconductor structure further includes wet etching the seed layer using an etchant comprising H2O2. In addition, the step of wet etching the seed layer is configured to form an extending portion having a slope sidewall.
    Type: Application
    Filed: October 5, 2017
    Publication date: February 1, 2018
    Inventors: Li-Guo LEE, Yi-Chen LIU, Yung-Sheng LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Patent number: 9806046
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: October 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 9779969
    Abstract: A package structure and a manufacturing method are provided. The package structure includes a semiconductor substrate and a first conductive feature over the semiconductor substrate. The package structure also includes a substrate and a second conductive feature over the substrate. The second conductive feature is bonded with the first conductive feature through a bonding structure. The package structure further includes a protection material surrounding the bonding structure, and the protection material is in direct contact with a side surface of the first conductive feature.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: October 3, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Patent number: 9735123
    Abstract: A semiconductor device structure and a manufacturing method are provided. The method includes forming a conductive pillar over a semiconductor substrate. The method also includes forming a solder layer over the conductive pillar. The method further includes forming a water-soluble flux over the solder layer. In addition, the method includes reflowing the solder layer to form a solder bump over the conductive pillar and form a sidewall protection layer over a sidewall of the conductive pillar during the solder layer is reflowed.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: August 15, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Guo Lee, Yi-Chen Liu, Yung-Sheng Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
  • Publication number: 20150262846
    Abstract: A package structure and a manufacturing method are provided. The package structure includes a semiconductor substrate and a first conductive feature over the semiconductor substrate. The package structure also includes a substrate and a second conductive feature over the substrate. The second conductive feature is bonded with the first conductive feature through a bonding structure. The package structure further includes a protection material surrounding the bonding structure, and the protection material is in direct contact with a side surface of the first conductive feature.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo LEE, Yung-Sheng LIU, Yi-Chen LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Publication number: 20150262953
    Abstract: A semiconductor device structure and a manufacturing method are provided. The method includes forming a conductive pillar over a semiconductor substrate. The method also includes forming a solder layer over the conductive pillar. The method further includes forming a water-soluble flux over the solder layer. In addition, the method includes reflowing the solder layer to form a solder bump over the conductive pillar and form a sidewall protection layer over a sidewall of the conductive pillar during the solder layer is reflowed.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo LEE, Yi-Chen LIU, Yung-Sheng LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Publication number: 20150262952
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a first substrate and a metal pad formed over the first substrate. The semiconductor structure further includes a seed layer formed over the metal pad and a conductive pillar formed over the seed layer. In addition, the seed layer has a sidewall and a bottom surface, and an angle between the sidewall and the bottom surface of the seed layer is in a range from about 20° to about 90°.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo LEE, Yi-Chen LIU, Yung-Sheng LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Publication number: 20150262955
    Abstract: A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo LEE, Yung-Sheng LIU, Yi-Chen LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Publication number: 20150262954
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a metal pad formed over the first substrate. The semiconductor structure further includes a solder stud formed over the metal pad, and the solder stud has a flat top surface parallel to a top surface of the first substrate.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Li-Guo LEE, Yi-Chen LIU, Yung-Sheng LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG
  • Publication number: 20150262951
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a metal pad formed over the first substrate. The semiconductor structure further includes a modified conductive pillar having a top portion and a bottom portion formed over the metal pad and a solder layer formed over the modified conductive pillar. In addition, the top portion of the modified conductive pillar has a first sidewall in a first direction and a bottom portion of the modified conductive pillar has a second sidewall in a second direction different from the first direction.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Guo LEE, Yung-Sheng LIU, Yi-Chen LIU, Yi-Jen LAI, Chun-Jen CHEN, Hsi-Kuei CHENG