Abstract: A semiconductor device includes a first source/drain region and a second source/drain region disposed in a semiconductor substrate. The semiconductor device also includes a word line structure disposed in the semiconductor substrate and between the first source/drain region and the second source/drain region. The word line structure includes a composite gate dielectric, and a lower electrode layer disposed over the composite gate dielectric. The word line structure also includes an upper electrode layer disposed over the lower electrode layer, and a graphene layer disposed between the lower electrode layer and the upper electrode layer. The composite gate dielectric includes a gate dielectric layer and a protection liner.

Abstract: A semiconductor device includes a first source/drain region and a second source/drain region disposed in a semiconductor substrate. The semiconductor device also includes a word line structure disposed in the semiconductor substrate and between the first source/drain region and the second source/drain region. The word line structure includes a composite gate dielectric, and a lower electrode layer disposed over the composite gate dielectric. The word line structure also includes an upper electrode layer disposed over the lower electrode layer, and a graphene layer disposed between the lower electrode layer and the upper electrode layer. The composite gate dielectric includes a gate dielectric layer and a protection liner.

Abstract: A method for preparing a semiconductor device structure includes forming a target layer over a semiconductor substrate, and forming a plurality of first mask patterns over the target layer. The method also includes forming a plurality of energy removable spacers on opposite sidewalls of each of the first mask patterns, and forming a second mask pattern over the target layer and between the energy removable spacers. The method further includes removing the energy removable spacers, and etching the target layer using the first mask patterns and the second mask pattern as a mask.

Abstract: A reliable semiconductor device and a method for preparing the reliable semiconductor device are provided. The semiconductor device includes at least one die comprising an integrated circuit region; a first recess region surrounding the integrated circuit region; and a second recess region surrounding the first recess region. A first columnar blocking structure is disposed in the first recess region and a second columnar blocking structure is disposed in the second recess region.

Abstract: The present disclosure provides a method for manufacturing a semiconductor structure having different filling layers. The method includes forming a multi-layer stack in a semiconductor substrate, wherein the multi-layer stack has a first filling layer and a second layer, the semiconductor substrate has two through vias, and two top portions of the multi-layer stack are respectively exposed through the two through vias. The method further includes recessing the multi-layer stack from the two through vias to respectively form two blind holes in the first filling layer and the second filling layer; selectively etching the second filling layer to form a global cavity between the two blind holes; filling the global cavity and the two blind holes with dielectric filling material to form an air void in the multi-layer stack; and forming a switch device over the semiconductor substrate, wherein the air void is formed under the switch device.

Abstract: A reliable semiconductor device is provided. The semiconductor device includes at least one die. The at least one die includes an integrated circuit region, a first recess region surrounding the integrated circuit region, and a second recess region surrounding the first recess region. A first recess is disposed in the first recess region and a second recess is disposed in the second recess region.

Abstract: A reliable semiconductor device and a method for preparing the reliable semiconductor device are provided. The semiconductor device includes at least one die comprising an integrated circuit region; a first recess region surrounding the integrated circuit region; and a second recess region surrounding the first recess region.

Abstract: The present disclosure relates to a method for preparing a semiconductor device with a composite landing pad. The method includes forming a first dielectric layer over a semiconductor substrate. The method also includes forming a barrier layer and a first lower metal plug penetrating through the first dielectric layer and in a cell region. The first lower metal plug is surrounded by the barrier layer. The method further includes depositing a silicon layer over the first dielectric layer, the barrier layer and the first lower metal plug. In addition, the method includes performing a salicide process to form an inner silicide portion over the first lower metal plug and an outer silicide portion over the barrier layer after the silicon layer is formed. The inner silicide portion is surrounded by the outer silicide portion, and a recess is formed over the inner silicide portion.

Abstract: The present disclosure provides a method for manufacturing a semiconductor structure having different filling layers. The method includes forming a multi-layer stack in a semiconductor substrate, wherein the multi-layer stack has a first filling layer and a second layer, the semiconductor substrate has two through vias, and two top portions of the multi-layer stack are respectively exposed through the two through vias. The method further includes recessing the multi-layer stack from the two through vias to respectively form two blind holes in the first filling layer and the second filling layer; selectively etching the second filling layer to form a global cavity between the two blind holes; filling the global cavity and the two blind holes with dielectric filling material to form an air void in the multi-layer stack; and forming a switch device over the semiconductor substrate, wherein the air void is formed under the switch device.

Abstract: The present disclosure provides a semiconductor device structure with an air gap structure and a method for forming the semiconductor device structure. The semiconductor device structure includes a first conductive contact and a second conductive contact disposed over a semiconductor substrate. The semiconductor device structure also includes a first dielectric layer surrounding the first conductive contact and the second conductive contact, and a second dielectric layer disposed over the first conductive contact, the second conductive contact and the first dielectric layer. The first dielectric layer is separated from the semiconductor substrate by a first air gap structure, the first dielectric layer is separated from the second dielectric layer by a second air gap structure, and the air gap structures reduce capacitive coupling between conductive features.

Abstract: A semiconductor structure and a method for manufacturing the same are disclosed. The semiconductor structure includes a semiconductor substrate, a multi-layer stack, a switch device, and an air void. The multi-layer stack is buried in the semiconductor substrate. The multi-layer stack includes a first filling layer and a second filling layer under the first filling layer, the first filling layer has a first etching rate, the second filling layer has a second etching rate, and the first etching rate and the second etching rate are different. The switch device is disposed over the semiconductor substrate. The air void is formed in the multi-layer stack and under the switch device. The air void is surrounded by dielectric filling material.

Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate having a plurality of doped regions; a plurality of silicide pads disposed respectively over the plurality of doped regions; and a plurality of conductive contacts disposed respectively over the plurality of silicide pads. The plurality of conductive contacts comprise a plurality of nanowires, a conductive liner disposed over the plurality of nanowires, and a conductor disposed over the conductive liner.

Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate having a plurality of doped regions; a plurality of silicide pads disposed respectively over the plurality of doped regions; and a plurality of conductive contacts disposed respectively over the plurality of silicide pads. The plurality of conductive contacts comprise a plurality of nanowires, a conductive liner disposed over the plurality of nanowires, and a conductor disposed over the conductive liner.

Abstract: A reliable semiconductor device is provided. The semiconductor device includes at least one die. The at least one die includes an integrated circuit region, a first recess region surrounding the integrated circuit region, and a second recess region surrounding the first recess region. A first recess is disposed in the first recess region and a second recess is disposed in the second recess region.

Abstract: A semiconductor structure and a method for manufacturing the same are disclosed. The semiconductor structure includes a semiconductor substrate, a multi-layer stack, a switch device, and an air void. The multi-layer stack is buried in the semiconductor substrate. The multi-layer stack includes a first filling layer and a second filling layer under the first filling layer, the first filling layer has a first etching rate, the second filling layer has a second etching rate, and the first etching rate and the second etching rate are different. The switch device is disposed over the semiconductor substrate. The air void is formed in the multi-layer stack and under the switch device. The air void is surrounded by dielectric filling material.

Abstract: This invention relates to a method for self-aligned fabricating an isolation structure of a trench capacitor. The method takes two steps to etch the substrate for forming the shallow trench of the isolation structure, wherein the conductive layer and the collar oxide layer of the trench capacitor remain intact during the etching processes.

Abstract: This invention relates to a method for self-aligned fabricating an isolation structure of a trench capacitor. The method takes two steps to etch the substrate for forming the shallow trench of the isolation structure, wherein the conductive layer and the collar oxide layer of the trench capacitor remain intact during the etching processes.

Abstract: An isolation structure of a trench capacitor of DRAM has a first isolation portion covering the trench capacitor and filling a top opening of the deep trench and a second isolation portion directly contacting the first isolation potion and surrounding the deep trench without overlapping the deep trench. The thickness of the second isolation portion is larger than the thickness of the first isolation portion.