Patents by Inventor Li Hao

Li Hao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240096996
    Abstract: A semiconductor device includes a first dielectric layer, a stack of semiconductor layers disposed over the first dielectric layer, a gate structure wrapping around each of the semiconductor layers and extending lengthwise along a direction, and a dielectric fin structure and an isolation structure disposed on opposite sides of the stack of semiconductor layers and embedded in the gate structure. The dielectric fin structure has a first width along the direction smaller than a second width of the isolation structure along the direction. The isolation structure includes a second dielectric layer extending through the gate structure and the first dielectric layer, and a third dielectric layer extending through the first dielectric layer and disposed on a bottom surface of the gate structure and a sidewall of the first dielectric layer.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lo-Heng Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11935794
    Abstract: A method of forming a semiconductor transistor device. The method comprises forming a channel structure over a substrate and forming a first source/drain structure and a second source/drain structure on opposite sides of the fin structure. The method further comprises forming a gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain structure and the second source/drain structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: March 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang, Zhi-Chang Lin, Li-Zhen Yu
  • Publication number: 20240087949
    Abstract: In some embodiments, the present disclosure relates to an integrated chip structure. The integrated chip structure includes a substrate. A gate electrode is over the substrate and a spacer structure laterally surrounds the gate electrode. A conductive via is disposed on the gate electrode. A liner is arranged along one or more sidewalls of the spacer structure. The conductive via has a bottommost surface that has a larger width than a part of the conductive via that is laterally adjacent to one or more interior sidewalls of the liner.
    Type: Application
    Filed: November 16, 2023
    Publication date: March 14, 2024
    Inventors: Li-Zhen Yu, Cheng-Chi Chuang, Chih-Hao Wang, Yu-Ming Lin, Lin-Yu Huang
  • Publication number: 20240088225
    Abstract: A method includes forming a gate stack on a first portion of a semiconductor substrate, removing a second portion of the semiconductor substrate on a side of the gate stack to form a recess, growing a semiconductor region starting from the recess, implanting the semiconductor region with an impurity, and performing a melt anneal on the semiconductor region. At least a portion of the semiconductor region is molten during the melt anneal.
    Type: Application
    Filed: November 14, 2023
    Publication date: March 14, 2024
    Inventors: Su-Hao Liu, Wen-Yen Chen, Li-Heng Chen, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Ying-Lang Wang
  • Publication number: 20240088204
    Abstract: Semiconductor structures and methods are provided. An exemplary method includes depositing a first conductive material layer over a substrate, patterning the first conductive material layer to form a first conductor plate over the substrate, forming a first high-K dielectric layer over the first conductor plate, forming a second high-K dielectric layer on the first high-K dielectric layer, forming a third high-K dielectric layer on the second high-K dielectric layer, and forming a second conductor plate over the third high-K dielectric layer and vertically overlapped with the first conductor plate, where a composition of the first high-K dielectric layer is the same as a composition of the third high-K dielectric layer and is different from a composition of the second high-K dielectric layer.
    Type: Application
    Filed: March 22, 2023
    Publication date: March 14, 2024
    Inventors: Li Chung Yu, Shin-Hung Tsai, Cheng-Hao Hou, Hsiang-Ku Shen, Chen-Chiu Huang, Dian-Hau Chen
  • Patent number: 11929321
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first insulating layer over a substrate. A first metal feature is formed in the first insulating layer and a second insulating layer is formed over the first insulating layer. A first metal via is formed through the second insulating layer to connect the first metal feature. A second metal feature is formed over the second insulating layer. The second metal feature has a convex top surface and a plane bottom surface, and the plane bottom is electrically connected to the first metal feature through the first metal via.
    Type: Grant
    Filed: May 9, 2022
    Date of Patent: March 12, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11923408
    Abstract: A semiconductor structure includes one or more channel layers; a gate structure engaging the one or more channel layers; a first source/drain feature connected to a first side of the one or more channel layers and adjacent to the gate structure; a first dielectric cap disposed over the first source/drain feature, wherein a bottom surface of the first dielectric cap is below a top surface of the gate structure; a first via disposed under and electrically connected to the first source/drain feature; and a power rail disposed under and electrically connected to the first via.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: March 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11923409
    Abstract: A semiconductor device includes a source/drain feature over a semiconductor substrate, channel layers over the semiconductor substrate and connected to the source/drain feature, a gate portion between vertically adjacent channel layers, and an inner spacer between the source/drain feature and the gate portion and between adjacent channel layers. The semiconductor device further includes an air gap between the inner spacer and the source/drain feature.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: March 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Yu Lin, Wei-Yang Lee, Chia-Pin Lin, Tzu-Hua Chiu, Kuan-Hao Cheng, Wei-Han Fan, Li-Li Su, Wei-Min Liu
  • Patent number: 11923432
    Abstract: A method of manufacturing a semiconductor device includes forming a multi-layer stack of alternating first layers of a first semiconductor material and second layers of a second semiconductor material on a semiconductor substrate, forming a first recess through the multi-layer stack, and laterally recessing sidewalls of the second layers of the multi-layer stack. The sidewalls are adjacent to the first recess. The method further includes forming inner spacers with respective seams adjacent to the recessed second layers of the multi-layer stack and performing an anneal treatment on the inner spacers to close the respective seams.
    Type: Grant
    Filed: January 3, 2023
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yoh-Rong Liu, Wen-Kai Lin, Che-Hao Chang, Chi On Chui, Yung-Cheng Lu, Li-Chi Yu, Sen-Hong Syue
  • Patent number: 11923886
    Abstract: An antenna device and a method for configuring the same are provided. The antenna device includes a grounding metal, a grounding part, a radiating part, a feeding part, a proximity sensor, and a sensing metal. The radiating part is electrically connected to the grounding metal through the grounding part. The feeding part is coupled to the grounding metal through a feeding point. The sensing metal is electrically connected to the proximity sensor. The sensing metal is separated from the radiating part at a distance. The distance is less than or equal to one thousandth of a wavelength corresponding to an operating frequency of the antenna device.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: March 5, 2024
    Assignee: COMPAL ELECTRONICS, INC.
    Inventors: Jhih-Ciang Chen, Shih-Chia Liu, Yen-Hao Yu, Li-Chun Lee, Yan-Ming Lin, Jui-Hung Lai
  • Publication number: 20240071847
    Abstract: A semiconductor package including two different adhesives and a method of forming are provided. The semiconductor package may include a package component having a semiconductor die bonded to a substrate, a first adhesive over the substrate, a heat transfer layer on the package component, and a lid attached to the substrate by a second adhesive. The first adhesive may encircle the package component and the heat transfer layer. The lid may include a top portion on the heat transfer layer and the first adhesive, and a bottom portion attached to the substrate and encircling the first adhesive. A material of the second adhesive may be different from a material of the first adhesive.
    Type: Application
    Filed: August 26, 2022
    Publication date: February 29, 2024
    Inventors: Yi-Huan Liao, Ping-Yin Hsieh, Chih-Hao Chen, Pu Wang, Li-Hui Cheng, Ying-Ching Shih
  • Publication number: 20240072021
    Abstract: A package structure and the manufacturing method thereof are provided. The package structure includes a first package including at least one first semiconductor die encapsulated in an insulating encapsulation and through insulator vias electrically connected to the at least one first semiconductor die, a second package including at least one second semiconductor die and conductive pads electrically connected to the at least one second semiconductor die, and solder joints located between the first package and the second package. The through insulator vias are encapsulated in the insulating encapsulation. The first package and the second package are electrically connected through the solder joints. A maximum size of the solder joints is greater than a maximum size of the through insulator vias measuring along a horizontal direction, and is greater than or substantially equal to a maximum size of the conductive pads measuring along the horizontal direction.
    Type: Application
    Filed: October 26, 2023
    Publication date: February 29, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Yu Chen, An-Jhih Su, Chi-Hsi Wu, Der-Chyang Yeh, Li-Hsien Huang, Po-Hao Tsai, Ming-Shih Yeh, Ta-Wei Liu
  • Publication number: 20240071665
    Abstract: A wheel control mechanism includes a support base, a wheel module, a first magnetic module and a second magnetic module. The wheel module, the first magnetic module and the second magnetic module are installed on the support base. The first magnetic module generates a magnetic attractive force to attract a metal ratchet of the wheel module. By adjusting the position of the second magnetic module relative to the first magnetic module, the strength of the magnetic attractive force is changed. Consequently, the rotation of the wheel module results in a tactile feel or does not result in the tactile feel.
    Type: Application
    Filed: September 14, 2022
    Publication date: February 29, 2024
    Inventors: Chun-Nan Su, Chun-Che Wu, Sheng-An Tsai, Ming-Hao Hsieh, Li-Kuei Cheng
  • Patent number: 11915972
    Abstract: Semiconductor devices including air spacers formed in a backside interconnect structure and methods of forming the same are disclosed. In an embodiment, a device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure; and a backside interconnect structure on a backside of the first transistor structure, the backside interconnect structure including a first dielectric layer on the backside of the first transistor structure; a first via extending through the first dielectric layer, the first via being electrically coupled to a first source/drain region of the first transistor structure; a first conductive line electrically coupled to the first via; and an air spacer adjacent the first conductive line, the first conductive line defining a first side boundary of the air spacer.
    Type: Grant
    Filed: July 15, 2022
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11916133
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes a gate structure sandwiched between and in contact with a first spacer feature and a second spacer feature, a top surface of the first spacer feature and a top surface of the second spacer feature extending above a top surface of the gate structure, a gate self-aligned contact (SAC) dielectric feature over the first spacer feature and the second spacer feature, a contact etch stop layer (CESL) over the gate SAC dielectric feature, a dielectric layer over the CESL, a gate contact feature extending through the dielectric layer, the CESL, the gate SAC dielectric feature, and between the first spacer feature and the second spacer feature to be in contact with the gate structure, and a liner disposed between the first spacer feature and the gate contact feature.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20230135528
    Abstract: A computing device is provided, which includes a volatile memory, a non-volatile memory, and a processor. A processor is configured to execute a main virtual machine for: during a detection period, detecting a cold area used by the main virtual machine from the volatile memory and the non-volatile memory; transmitting first data belonging to the cold area in the volatile memory and the non-volatile memory to a backup device; when determining that a first transmission condition is satisfied, transmitting a second data used by the main virtual machine in the volatile memory and the non-volatile memory to the backup device; and when determining that an abnormal event has occurred, notifying the abnormal event to the backup device, so as to execute a backup virtual machine in the backup device according to the first data and the second data.
    Type: Application
    Filed: November 25, 2021
    Publication date: May 4, 2023
    Inventors: Jiann Wen WANG, Zheng Xiu WU, Wen To HUANG, Li Hao CHIANG
  • Publication number: 20230124259
    Abstract: A method of measuring optical properties of a specimen includes generating illumination light at a plurality of illumination wavelengths and, for each of the plurality of illumination wavelengths, directing the illumination light to impinge on the specimen, collecting sample light passing through the specimen, and detecting the collected sample light using a polarization state analyzer to form a set of polarization channels. The method also includes receiving a calibration tensor, converting the set of polarization channels for each of the illumination wavelengths into Stokes parameter maps using the calibration tensor, denoising the Stokes parameter maps, and deconvolving the Stokes parameter maps to provide density, anisotropy, and orientation measurements of the specimen. The method can multiplex intrinsic density, anisotropy, and orientation measurements of the specimen and density, anisotropy, and orientation measurements of labeled fluorescent molecules.
    Type: Application
    Filed: November 16, 2022
    Publication date: April 20, 2023
    Inventors: Shalin Mehta, Ivan Ivanov, Li-Hao Yeh
  • Publication number: 20230122901
    Abstract: The present invention includes a main device and a backup device. A first backup system element of the main device is used to determine whether a first estimated time is less than a second estimated time. The first estimated time is a time period for directly transmitting pending data. The second estimated time is a time period for transmitting the pending data after the pending data is compressed by a current compression algorithm. If yes, the first backup system element directly transmits the pending data to a second backup system element of the backup device. If not, the first backup system element compresses the pending data by the current compression algorithm, updates the pending data and the current compression algorithm, and re-determines whether the first estimated time is less than the second estimated time. The present invention improves availability of data backup when a network bandwidth is poor.
    Type: Application
    Filed: November 11, 2021
    Publication date: April 20, 2023
    Inventors: Jiann-Wen WANG, Zheng-Xiu WU, Wen-To HUANG, Li-Hao CHIANG
  • Publication number: 20230080237
    Abstract: A method of measuring optical properties of a specimen, for example, a uniaxial specimen, includes generating a plurality of illumination patterns incident on the specimen and, for each of the plurality of illumination patterns, collecting sample light passing through the specimen and detecting the collected sample light using a polarization state analyzer to form a set of polarization channels. The method also includes receiving a calibration tensor, converting the set of polarization channels for each of the illumination patterns into Stokes parameter maps using the calibration tensor, and deconvolving the Stokes parameter maps to provide volumetric measurement of permittivity tensor of the specimen, specifically, absorption, optical path length, optical anisotropy, and 3D orientation of the specimen.
    Type: Application
    Filed: November 16, 2022
    Publication date: March 16, 2023
    Inventors: Shalin Mehta, Li-Hao Yeh, Ivan Ivanov
  • Publication number: 20230027774
    Abstract: To automatically evaluate the reasonable price of real estate according to the housing data, the present invention discloses a novel intelligent property evaluation system. The system includes the following components: a housing data input system, a pre-processing filter, a feature extractor, a housing price trainer, and a housing price predictor, wherein the housing price predictor further includes a regression model generator and a decision integrator. The pre-processing filter is used to filter unreasonable samples from housing data and integrate synonymous features. The feature extractor is used to choose required variables of housing price model. The housing price trainer generates housing price model which is trained by a great amount of housing data. The housing price predictor then generates a prediction by the trained model. Furthermore, to maintain the accuracy of prediction under the social evolution, the housing price predictor could be regularly or irregularly updated by a rolling-based method.
    Type: Application
    Filed: July 15, 2022
    Publication date: January 26, 2023
    Inventors: Tien-Hao Chang, Chin-Mei Chiang, Sheng-Wen Huang, Shau-Wei Huang, Po-Yu Shen, Li-Hao Zeng