Patents by Inventor Li-Hen Chen

Li-Hen Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SIDEWALL TRACING NANOPROBES, METHOD FOR MAKING THE SAME, AND METHOD FOR USE
    Publication number: 20100005553
    Abstract: Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
    Type: Application
    Filed: July 27, 2007
    Publication date: January 7, 2010
    Inventors: Sungho Jin, Li-Hen Chen, Gregory Dahlen, Hao-Chih Liu