Patents by Inventor LI-HSING CHIEN

LI-HSING CHIEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In situ cleaning apparatus and system thereof
    Patent number: 11273470
    Abstract: An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
    Type: Grant
    Filed: December 4, 2019
    Date of Patent: March 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Li-Hsing Chien, Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang
  • IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
    Publication number: 20200101502
    Abstract: An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
    Type: Application
    Filed: December 4, 2019
    Publication date: April 2, 2020
    Inventors: LI-HSING CHIEN, YUNG-TI HUNG, ROUH JIER WANG, YU-TE CHANG
  • In situ cleaning apparatus and system thereof
    Patent number: 10500616
    Abstract: An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: December 10, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Li-Hsing Chien, Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang
  • IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
    Publication number: 20170225207
    Abstract: An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
    Type: Application
    Filed: April 26, 2017
    Publication date: August 10, 2017
    Inventors: LI-HSING CHIEN, YUNG-TI HUNG, ROUH JIER WANG, YU-TE CHANG
  • In situ clean apparatus and method thereof
    Patent number: 9643217
    Abstract: An apparatus includes a sprinkler configured for spraying liquid and a member with a nano-coating surface. The nano-coating surface is configured to receive liquid sprayed from the sprinkler. The apparatus further includes a sensor associated with the member and the sensor is configured to detect a signal directly or indirectly corresponding to a film deposition on the nano-coating surface. Moreover, the apparatus has a controller coupled with the sensor and the sprinkler, wherein the signal detected by the sensor is transmitted to the controller and the controller is configured to command the sprinkler spraying liquid on the nano-coating surface while a value of the signal reaches a threshold value.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: May 9, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Li-Hsing Chien, Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang
  • IN SITU CLEAN APPARATUS AND METHOD THEREOF
    Publication number: 20150107623
    Abstract: An apparatus includes a sprinkler configured for spraying liquid and a member with a nano-coating surface. The nano-coating surface is configured to receive liquid sprayed from the sprinkler. The apparatus further includes a sensor associated with the member and the sensor is configured to detect a signal directly or indirectly corresponding to a film deposition on the nano-coating surface. Moreover, the apparatus has a controller coupled with the sensor and the sprinkler, wherein the signal detected by the sensor is transmitted to the controller and the controller is configured to command the sprinkler spraying liquid on the nano-coating surface while a value of the signal reaches a threshold value.
    Type: Application
    Filed: October 18, 2013
    Publication date: April 23, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: LI-HSING CHIEN, YUNG-TI HUNG, ROUH JIER WANG, YU-TE CHANG