Abstract: Embodiments disclosed herein relate to using an implantation process and a melting anneal process performed on a nanosecond scale to achieve a high surface concentration (surface pile up) dopant profile and a retrograde dopant profile simultaneously. In an embodiment, a method includes forming a source/drain structure in an active area on a substrate, the source/drain structure including a first region comprising germanium, implanting a first dopant into the first region of the source/drain structure to form an amorphous region in at least the first region of the source/drain structure, implanting a second dopant into the amorphous region containing the first dopant, and heating the source/drain structure to liquidize and convert at least the amorphous region into a crystalline region, the crystalline region containing the first dopant and the second dopant.

Abstract: A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.

Abstract: The methods and configurations herein provide for analysis of microplate based assays. Certain aspects include: an optical illumination panel; a plurality of sample wells configured to receive light from the optical illumination panel, and wherein the plurality of sample wells is configured with a first field of view; at least one aperture array configured to isolate directed light therethrough the plurality of sample wells; at least one optical array configured to receive optical information from the plurality of sample platforms, wherein the at least optical array comprises an array of individual microprisms configured with equal apex angles at distal equidistances along a row, wherein the individual microprism apex angles decrease toward the center of the row culminating in at least one flat surface along a center portion of the row; and a detector configured to capture the optical information with a second field of view as provided by the at least one optical array.

Abstract: The methods and configurations herein provide for analysis of microplate based assays. Certain aspects include: an optical illumination panel; a plurality of sample wells configured to receive light from the optical illumination panel, and wherein the plurality of sample wells is configured with a first field of view; at least one aperture array configured to isolate directed light therethrough the plurality of sample wells; at least one optical array configured to receive optical information from the plurality of sample platforms, wherein the at least optical array comprises an array of individual microprisms configured with equal apex angles at distal equidistances along a row, wherein the individual microprism apex angles decrease toward the center of the row culminating in at least one flat surface along a center portion of the row; and a detector configured to capture the optical information with a second field of view as provided by the at least one optical array.