Patents by Inventor Li-Kong Tern

Li-Kong Tern has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6948619
    Abstract: A pod for transporting reticles is made with a reticle support that has a ?-shape and is provided with pins, whose arrangement matches the location of chrome-free areas on a reticle base. Due to that, the pins, when supporting the reticle, come into contact with the reticle in chrome-free areas thereof. Thus, scratching the metallic areas and releasing metallic particles is prevented from occurring.
    Type: Grant
    Filed: July 5, 2002
    Date of Patent: September 27, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., LTD
    Inventors: Wei-Yu Su, Li-Kong Tern, Dong-Hsu Cheng
  • Publication number: 20040005209
    Abstract: A pod for transporting reticles is made with a reticle support that has a &pgr;-shape and is provided with pins, whose arrangement matches the location of chrome-free areas on a reticle base. Due to that, the pins, when supporting the reticle, come into contact with the reticle in chrome-free areas thereof. Thus, scratching the metallic areas and releasing metallic particles is prevented from occurring.
    Type: Application
    Filed: July 5, 2002
    Publication date: January 8, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Yu Su, Li-Kong Tern, Dong-Hsu Cheng