Patents by Inventor Li-Shun Wang

Li-Shun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Removal of residue from a substrate
    Patent number: 6841470
    Abstract: A method and an apparatus of removing a particle from a metal plug on a substrate is disclosed. The method comprises introducing a slurry onto the metal layer and polishing the metal layer. A solution comprising hydrogen peroxide is introduced onto the metal plug and at least one particle is removed from the metal plug.
    Type: Grant
    Filed: December 31, 1999
    Date of Patent: January 11, 2005
    Assignee: Intel Corporation
    Inventors: Li-Shun Wang, John Chu
  • REMOVAL OF RESIDUE FROM A SUBSTRATE
    Publication number: 20020001955
    Abstract: A method and an apparatus of removing a particle from a metal layer over a substrate is disclosed. The method comprises introducing a slurry onto the metal layer and polishing the metal layer. A solution comprising hydrogen peroxide is introduced onto the metal layer and at least one particle is removed from the metal layer.
    Type: Application
    Filed: December 31, 1999
    Publication date: January 3, 2002
    Inventors: LI-SHUN WANG, JOHN CHU
  • AG-perovskite cermets for thin film solid oxide fuel cell air-electrode applications
    Patent number: 6004696
    Abstract: An air electrode for a solid oxide fuel cell having high conductivity and low interfacial resistance is disclosed. Said air electrode is composed of an Ag-perovskite cermet.
    Type: Grant
    Filed: March 22, 1995
    Date of Patent: December 21, 1999
    Assignee: Northwestern University
    Inventors: Scott Alexander Barnett, Li-Shun Wang
  • Solid-oxide fuel cells
    Patent number: 5395704
    Abstract: Fuel cells which have a solid-oxide, thin film electrolyte and thin film cermet air and fuel electrodes. Processes for manufacturing thin film fuel cells in which air electrode, electrolyte, and fuel electrode films are deposited on a porous refractory substrate by magnetron sputtering.
    Type: Grant
    Filed: November 19, 1992
    Date of Patent: March 7, 1995
    Assignee: North Western Univ. Technology Transfer Prog.
    Inventors: Scott A. Barnett, Li-Shun Wang